Coated optics for DUV excimer laser application

Anlagen- und Prozesstechnik für die Mikrobearbeitung mit Vakuum-UV Excimer-Laser

“…Durch eine Nachbehandlung von dielektrischen Spiegeln, beispielsweise durch Laserbestrahlung mit kleinen Energiedichten (Laserkonditionierung [13], [22]), kann die Strahlungsbesta È ndigkeit beeinflusst werden. Durch eine Nachbehandlung von dielektrischen Spiegeln, beispielsweise durch Laserbestrahlung mit kleinen Energiedichten (Laserkonditionierung [13], [22]), kann die Strahlungsbesta È ndigkeit beeinflusst werden.…”

Biomimetic Surfaces for High‐Performance Optics

“…[6] Despite the technical importance, actual material solutions for improved performance are limited, especially in the ultraviolet spectral region. [7] To date, two kinds of approaches are available for fabricating antireflective surfaces. One is coating porous or multilayered films [6,[8][9][10][11][12][13][14] on the surface of devices.…”

Biomimetic Interfaces for High-Performance Optics in the Deep-UV Light Range

“…Today, antireflection coatings are commonly used to suppress reflection of light from the surface of optical components but also to reduce the essential transmission of light. Despite the technical importance, actual material solutions for improved performance are limited, especially in the ultraviolet spectral region . Today antireflection (AR) coatings are most frequently based on single- or multilayer interference structures with alternating high and low refractive indices. – An alternative to these multilayer films are subwavelength structured antireflective surfaces that provide a graded transition between the refractive indices of the two interfacing media. , Nature provides solutions for such antireflective structures (ARS) as they are found, e.g., on the corneal surfaces of a moth eye and night-active butterflies. , …”

“…Several characteristics of surfaces tailored with ARS offer distinct advantages compared to layers of thin dielectric films . First, thin-film coatings suffer from mechanical stability problems like layer ablation and tensile stress if optical devices are used over a broad thermal range. , Second, appropriate coating materials with suitable refractive indices do barely exist. Common single- and multilayer configurations are therefore only applicable within a small wavelength range and normal incidence of light.…”

“…The particle diameter was 7 ± 1 nm and as such small enough not to introduce substantial scattering of light. The method is applicable for various kinds of materials and was used to generate nanopattern on glass, silica, quartz, calcium fluoride, mica, as well as sapphire and diamond. , In case of DUV applications, the number of suitable materials is virtually limited to fused silica, quartz, magnesium fluoride, and calcium fluoride . Thus, we used fused silica for our experiments, which is also the most common material for optical components.…”