Investigations of two-photon polymerization of inorganic-organic hybrid materials initiated by femtosecond Ti:sapphire laser pulses are performed. First applications of this technique for the fabrication of three-dimensional microstructures and photonic crystals in inorganic-organic hybrid polymers with a structure size down to 200 nm and a periodicity of 450 nm are discussed.

Stereolithography (SLA) is a widely used technique for the fabrication of prototypes and small series products. The main advantage of SLA and related solid freeform fabrication (SFF) techniques is their capability to fabricate parts with complex shapes with high resolution. Although the spectrum of available materials has been widened in recent years, there is still a lack of materials which can be processed with SLA on a routine basis. In this work, a micro-SLA (μSLA) system is presented which can shape a number of different photopolymers with resolutions down to 5 μm in the xy-plane and 10 μm in the z-direction. The system is capable of processing various specifically tailored photopolymers which are based on acrylate chemistry. The materials processed for this work range from hybrid sol-gel materials (ORMOCER) to photo-crosslinked elastomers and hydrogels. The elastic moduli of these materials can be tuned over several orders of magnitude and range from 0.1 MPa to 8000 MPa. The reactivity of these monomers is sufficient for achieving writing speeds up to 500 mm s −1 which is comparable to commercial SLA resins. Various test structures are presented which show the suitability of the process for fabricating parts required for applications in micro-mechanical systems as well as for applications in biomedical engineering. Using the presented system, internal channels with a diameter of 50 μm and a length of 1500 μm could be fabricated. It was also possible to manufacture a micro-mechanical system consisting of a fixed axe and a free spinning turbine wheel.

An overview is given of the applications of short and ultrashort lasers in material processing. Shorter pulses reduce heat-affected damage of the material and opens new ways for nanometer accuracy. Even forty years after the development of the laser there is a lot of effort in developing new and better performing lasers. The driving force is higher accuracy at reasonable cost, which is realised by compact systems delivering short laser pulses of high beam quality. Another trend is the shift towards shorter wavelengths, which are better absorbed by the material and which allows smaller feature sizes to be produced. Examples of new products, which became possible by this technique, are given. The trends in miniaturization as predicted by Moore and Taniguchi are expected to continue over the next decade too thanks to short and ultrashort laser machining techniques. After the age of steam and the age of electricity we have entered the age of photons now Keywords: Micro-machining, Laser, Ablation 101, (Figure 2.3) has simulated the interaction and ablation behaviour of aluminium, copper and silicon at 266 nm wavelength. The optical penetration depth was 7, 12 and 5 nm respectively. The applied power density was in the range of 5 to 50.109 W/cm2. It was found that the material evaporates as small particles (0.3-10 nm), most of them smaller than 1 nm. The average velocity of

Laser ablation in liquid-phase (LAL) has been developed since the 1990s, but the interest in laser synthesis of colloids has emerged in the last decade due to a significant improvement in the production rate, proven comparative advantages in biomedical and catalysis applications, and recent commercialization. However, the method relies on highly transient phenomena, so that the fundamental understanding lacks behind the LAL synthesis refinement research. The complexity of the physics and chemistry involved has led to experimental and theoretical investigations that attempt to provide a basic description of the underlying processes but face the challenge of temporal and spatial resolution as well as non-equilibrium conditions. It appears that the processes occurring at the early time scales, ranging from femtoseconds to several microseconds are critical in the definition of the final product. The review is mainly dedicated to the comprehensive description of the processes occurring at early time scales, which include the description of laser-matter interaction for ultrashort and short laser pulses, plasma formation processes as well as comparison of the measured plasma parameters at these time scales, and subsequent description of the cavitation bubble dynamics. Furthermore, the plasma and cavitation bubble chemistry are addressed, and their impact on the nanoparticle formation is emphasized.

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