Coherent X-ray beam expander based on a multilens interferometer

Zverev, D.; N., Sorokovikov, M.; Yunkin, V.; Кузнецов, С. П.; Snigirev, A.

doi:10.1364/oe.434656

Cited by 6 publications

(4 citation statements)

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“…It should be noted that the use of a 100-lens interferometer as a beam expander makes it possible to control the angular size and photon flux density of the generated beam and is capable of operating both in coherent and incoherent modes 7 .…”

Section: Discussionmentioning

confidence: 99%

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Metrology of a coherent x-ray beam expander for advanced synchrotron sources

N.¹,

Zverev

Yunkin³

et al. 2022

Advances in X-Ray/Euv Optics and Components XVII

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The X-ray beam expander for advanced synchrotron sources based on Si planar compound parabolic refractive lenses (CRLs) with aperture of 10 micron was considered. The lenses were fabricated by using MEMS technologies including a lithography and a deep silicon etching for CRLs pattern generation in the hard mask and the pattern transfer into silicon wafer down to 40 μm, respectively. To minimize an influence of the manufacturing errors on the CRLs optical properties special control and metrology of the geometrical parameters of the lenses were proposed and applied. The errors influence on the X-ray beam expander parameters was considered theoretically and the related computer simulations were performed.

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Section: Discussionmentioning

confidence: 99%

“…Planar refractive parabolic lenses with a physical aperture of 10 μm and 100-lens interferometers based on them were fabricated by using three different Si microfabrication technologies. The interferometer was developed and used as the Xray beam expander 7 .…”

Section: Introductionmentioning

confidence: 99%

Metrology of a coherent x-ray beam expander for advanced synchrotron sources

N.¹,

Zverev

Yunkin³

et al. 2022

Advances in X-Ray/Euv Optics and Components XVII

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“…One of the first nanofocusing PCRLs made of silicon (Snigirev et al, 2009) had the following parameters for the biconcave elements: aperture A = 50 mm, curvature radius R = A/8, minimum thickness d l = 2 mm, length of one element p l = d l + A 2 /4R. Later, PCRLs with apertures of 30 mm (Snigirev et al, 2014) and 10 mm (Zverev et al, 2021) were manufactured with the same ratios for the other parameters as indicated above.…”

Section: Computer Simulations and Their Analysismentioning

confidence: 99%

“…Typical examples of PCRLs made of silicon are presented in works by Snigirev et al (2009Snigirev et al ( , 2014 and Zverev et al (2021). They look like a sequence of elements in which each element is a biconcave lens, as shown in Fig.…”

Section: Introductionmentioning

confidence: 99%

On the theory of synchrotron radiation nanofocusing with planar compound refractive lenses

Kohn¹

2022

J Synchrotron Radiat

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Two new methods of computer simulation of synchrotron radiation nanofocusing with planar compound refractive lenses (PCRLs) are presented. The methods are based on the results of analytical theory. In contrast to previous works, the new methods take into account the PCRL aperture. It is especially important at high photon energies, when absorption is low and the calculations based on analytical theory, i.e. without taking into account the aperture, give incorrect results. A computer program was created and specific results were obtained for a silicon PCRL having an aperture of 50 µm, element length of 102 µm and minimum thickness of 2 µm. For an energy of 50 keV and number of elements 300, it focuses the beam to 31 nm size at a distance of one and a half times its length. Analysis of the calculation accuracy for the proposed methods is performed, as well as a demonstration of the capabilities of the computer program.

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