2011 IEEE International Symposium of Circuits and Systems (ISCAS) 2011
DOI: 10.1109/iscas.2011.5938067
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Compact lumped element model for TSV in 3D-ICs

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Cited by 20 publications
(4 citation statements)
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“…In our previous work [17]- [18], a lumped model for the TSV is proposed under the assumptions of an uniform doping. Here, the effects of non-uniform substrate doping profile on the electrical performance of a TSV are studied.…”
Section: Analysis and Resultsmentioning
confidence: 99%
“…In our previous work [17]- [18], a lumped model for the TSV is proposed under the assumptions of an uniform doping. Here, the effects of non-uniform substrate doping profile on the electrical performance of a TSV are studied.…”
Section: Analysis and Resultsmentioning
confidence: 99%
“…Fig. 10 compares the PE of C ox between the simulated and calculated results using (8) in this paper (PE1) and [22, eq. (4)] (PE2), respectively.…”
Section: A Verification Of the Insulator Capacitance Expressionmentioning
confidence: 99%
“…In addition, the substrate resistance depends on the number of body contacts surrounding the TSV. Its value may range from 1.5kΩ , when no body contacts surrounding the TSV, to 50Ω when the TSV it is surrounded by 4 body contacts [16]. Based on ITRS 2010 predictions [2], we used 50u TSV length in our experiments.…”
Section: Tsv Wire Modelmentioning
confidence: 99%