Comparison of MEMS variable optical attenuator designs

Marxer, C.; Jong, B. de; Rooif, N. de

doi:10.1109/omems.2002.1031505

Cited by 24 publications

(7 citation statements)

References 1 publication

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“…The wavelength dependence of the loss (WDL) also increases, from 1.0 dB at 3 dB of attenuation to 6 dB at 30 dB. These values are typical of shutter-insertion VOAs, and could be improved by using the alternative principle of image translation by a moving mirror [9].…”

Section: Index Terms-microelectromechanical Systems (Mems) Microoptomentioning

confidence: 97%

Multistate Latching MEMS Variable Optical Attenuator

Syms

Zou

Stagg

et al. 2004

IEEE Photon. Technol. Lett.

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Abstract-A multistate latching variable optical attenuator (VOA) is demonstrated using microelectromechanical systems (MEMS) technology. The mechanism is used to fix the position of a shutter inserted into the optical path between two single-mode fibers. The mechanism and fiber mounts are fabricated in 85 m thick silicon using bonded silicon-on-insulator material, by deep reactive ion etching. The device can be continuously adjusted or latched into a discrete set of attenuation states using a rack-and-tooth mechanism driven by electrothermal shape bimorph actuators. Electromechanical and optical characterization is performed to demonstrate a latching VOA function, with a maximum attenuation of 30 dB. Index Terms-Microelectromechanical systems (MEMS), microoptoelectromechanical systems (MOEMS), variable optical attenuator (VOA).

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Section: Index Terms-microelectromechanical Systems (Mems) Microoptomentioning

confidence: 97%

Multistate Latching MEMS Variable Optical Attenuator

Syms

Zou

Stagg

et al. 2004

IEEE Photon. Technol. Lett.

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“…Both transmission and reflection VOAs have been reported. [98] The schematics and the SEM of the fabricated device are shown in Fig. 7.36.…”

Section: Optical Attenuator Arraymentioning

confidence: 99%

Free-Space Optical MEMS

Wu¹,

Patterson²

2006

Mems

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“…The amount of misalignment determines the percentage of attenuation. It has been found that reflector-type VOAs are more promising in comparison to the former type [1]. By including interference, performance of the reflector based VOAs can be improved.…”

Section: Introductionmentioning

confidence: 99%