Electronic structure calculations are used to predict the activation enthalpies of diffusion for a range of impurity atoms ͑aluminium, gallium, indium, silicon, tin, phosphorus, arsenic, and antimony͒ in germanium. Consistent with experimental studies, all the impurity atoms considered diffuse via their interaction with vacancies. Overall, the calculated diffusion activation enthalpies are in good agreement with the experimental results, with the exception of indium, where the most recent experimental study suggests a significantly higher activation enthalpy. Here, we predict that indium diffuses with an activation enthalpy of 2.79 eV, essentially the same as the value determined by early radiotracer studies. © 2008 American Institute of Physics. ͓DOI: 10.1063/1.2918842͔ Germanium ͑Ge͒ has the potential to replace silicon ͑Si͒ in advanced nanoelectronic devices because of the higher mobility of holes and electrons, compatibility with Si manufacturing processes, increased dopant solubility, and smaller band gap. 1 The precise control required for the fabrication of these devices would be greatly aided by an accurate determination of the diffusion properties of impurities in Ge. 2 This is particularly important for donor impurities for which activation control can be problematic. 3 In previous studies, it has been concluded that most impurities mainly occupy substitutional lattice sites in Ge and, with the exception of boron ͑B͒, dopant diffusion is mainly mediated by vacancies ͑V͒ as interstitial mechanisms typically have significantly higher activation enthalpies. 2, Aluminium ͑Al͒, gallium ͑Ga͒, indium ͑In͒, and B are acceptor atoms that can potentially be used as p-type dopants in Ge technology. Recent experiments 4 on B diffusion in Ge yield an activation enthalpy of 4.65 eV that agrees with earlier results, but the absolute values of the B diffusion coefficients are several orders of magnitude lower than those reported earlier. 5 Previous experimental studies on Al diffusion yield activation enthalpies in the range of 3.2-3.45 eV. 6,7 Södervall et al. 8 obtained an activation enthalpy of 3.31 eV for Ga diffusion in Ge. This value is supported by the more recent experimental studies of Riihimäki et al. 9 who determined an activation enthalpy of 3.21 eV for Ga diffusion in Ge via a V-mediated mechanism. The spread in the data reported for the activation enthalpy of In diffusion in Ge is especially large ͑0.85 eV͒. The radiotracer studies of Pantaleev 10 suggest a value of 2.78 eV, whereas the In profiles measured by Dorner et al. 11 by means of secondary ion mass spectrometry ͑SIMS͒ yield a value of 3.63 eV.Carbon ͑C͒, Si, and tin ͑Sn͒ are important isovalent impurities. C atoms have been observed to be relatively immobile; however, they can retard the diffusion of phosphorus ͑P͒, arsenic ͑As͒, and antimony ͑Sb͒ atoms in Ge. 26,27 Recent experimental studies by Silvestri et al. 15 ͑using SIMS͒ concluded that Si diffusion in Ge is mediated by V with an activation enthalpy of 3.32 eV, whereas previous studies ...