2003
DOI: 10.1016/s0169-4332(03)00344-1
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Comparison of the electrical and optical properties for SnO2:Sb films deposited on polyimide and glass substrates

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Cited by 46 publications
(29 citation statements)
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“…In addition, they exhibit low electrical resistivity and high optical transmittance. Either doped or non-doped, tin oxide thin films can be fabricated by a number of techniques: chemical vapor deposition [1], sputtering [2], sol-gel coating [3], and spray pyrolysis [4][5][6]. The sol-gel method has such advantages as cheap cost and flexible deposition technique.…”
Section: Introductionmentioning
confidence: 99%
“…In addition, they exhibit low electrical resistivity and high optical transmittance. Either doped or non-doped, tin oxide thin films can be fabricated by a number of techniques: chemical vapor deposition [1], sputtering [2], sol-gel coating [3], and spray pyrolysis [4][5][6]. The sol-gel method has such advantages as cheap cost and flexible deposition technique.…”
Section: Introductionmentioning
confidence: 99%
“…[1][2][3][4] We measured the thermal diffusivity of the deposited films using the pulsed light heating thermoreflectance method with nanosecond laser pulses. [14][15][16] Monolayer ATO and TTO films and trilayer Mo/(ATO or TTO)/Mo films were prepared by rf magnetron sputtering from high-density ceramic targets of SnO 2 The monolayer films were used to obtain the structural, electrical, and optical properties.…”
Section: Methodsmentioning
confidence: 99%
“…SnO 2 -based transparent conductive oxide (TCO) films, such as Sb-doped SnO 2 (ATO), [1][2][3][4][5][6][7] are the most chemically stable among TCO materials-an important prerequisite for several applications, such as solar cells. However, as Sb is undesirable for industrial applications because of its toxicity, it is important to find alternative doping materials.…”
Section: Introductionmentioning
confidence: 99%
“…Tin-doped indium oxide (ITO) [4] is a widely used TCO but it is not suit for the sustainable economic development for its scarce resource, toxicity and high cost. Among TCOs, Sb doped SnO 2 (ATO) as a wide band gap semiconductor has been focused due to its prominent advantages such as abundant resources, chemical stability, thermal stability, non-toxicity, mechanical durability and especially low cost [5][6][7][8] .…”
Section: Introductionmentioning
confidence: 99%
“…Various deposition methods have been used to prepare the ATO thin films, such as sol-gel dipcoating technique [9][10][11] , spray pyrolysis technique [12][13][14] and magnetron sputtering technique [6][7] . The structural, electrical and optical properties of ATO thin films dependent on the fabrication parameters, such as deposition temperature, oxygen pressure, thickness, annealing treatment and Sb content, have been intensively investigated.…”
Section: Introductionmentioning
confidence: 99%