Compensation, Tuning, and Trimming of MEMS Resonators

Tabrizian, Roozbeh; Ayazi, Farrokh

doi:10.1002/9783527676330.ch13

Cited by 3 publications

(1 citation statement)

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“…Earlier works report on the uniform thickness of the AlN films sputtered on vertical surfaces, though AlN grains tilt to the vertical surface normal is large. [24][25][26] Additionally, the structures demonstrated in these works do not have a large aspect ratio and the device's body is formed in such a way that there is no shadowing effect, which is not always possible.…”

Section: Aln Growth On Vertical Surfacesmentioning

confidence: 99%

In‐Plane AlN‐based Actuator: Toward a New Generation of Piezoelectric MEMS

Bespalova

Nieminen

Gabrelian

et al. 2023

Adv Elect Materials

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A novel design that utilizes aluminum nitride (AlN) piezoelectric thin films deposited on vertical surfaces for lateral motion and sensing is a step toward emerging multi-axial microelectromechanical systems (MEMS). This work demonstrates the fabrication process and potential applications of an in-plane moving piezoactuator. The actuator is excited using the inverse piezoelectric effect of the AlN thin film grown on the vertical surfaces of a Si cantilever. Lateral motion of the actuator is enabled when a voltage is applied between the top and bottom electrodes of the device, which are highly doped Si and titanium nitride thin film. The motion of the actuator is captured using scanning electron microscope.

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Section: Aln Growth On Vertical Surfacesmentioning

confidence: 99%