1999
DOI: 10.1063/1.371615
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Complementary analysis techniques for the morphological study of ultrathin amorphous carbon films

Abstract: This article presents experimental results for morphological assessment of sub-50-nm thick hydrogenated amorphous carbon (a-C:H) overcoats. The films were grown by rf plasma enhanced chemical vapor deposition using Ar/C2H2 gas mixture onto heterogeneous (Al2O3–TiC) ceramic substrates. They were analyzed using complementary information from scanning electron microscopy, energy dispersive x-ray analysis and atomic force microscopy. We found that the bias deposition voltage and the nature of the substrate (Al2O3 … Show more

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Cited by 22 publications
(8 citation statements)
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“…7 and 8; these are formed on the boundary layer, where the colloidal concentration is high, the evaporation rate is slow and therefore where desorption from the nanospheres is likely to proceed further. Overall, the results show that it is only by comparing results from several techniques that one can interpret correctly images of nanostructures, as usually such techniques are complementary [30,31].…”
Section: Discussionmentioning
confidence: 91%
“…7 and 8; these are formed on the boundary layer, where the colloidal concentration is high, the evaporation rate is slow and therefore where desorption from the nanospheres is likely to proceed further. Overall, the results show that it is only by comparing results from several techniques that one can interpret correctly images of nanostructures, as usually such techniques are complementary [30,31].…”
Section: Discussionmentioning
confidence: 91%
“…The EDX data obtained at 5 kV indicates large Ga atomic percentages (up to 25%). The Kanaya range for 5 kV electrons is around 500 nm [15], hence these EDX analysis of the IBD samples is mostly confined to the carbon film. Again, according to Monte Carlo simulations [14], the Ga + ion penetrates about 10-15 nm into an aluminium target.…”
Section: Discussionmentioning
confidence: 99%
“…Scratch tests of ultrathin, ionbeam-deposited carbon nitride films indicate film failure by brittle fracture followed by abrasive wear [14]. Nanoindentation and nanoscratching is being used to evaluate fracture toughness of ultrathin films [11,[64][65][66].…”
Section: B Hardness and Elastic Modulusmentioning
confidence: 99%