2006
DOI: 10.1016/j.ultramic.2006.01.015
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Components for high speed atomic force microscopy

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Cited by 225 publications
(154 citation statements)
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“…For the XY scanner [ Fig. 1(a)], we used a flexure stage with four-fold symmetry, which is similar to the design reported by Hansma et al [9][10][11][12][13] The main body is made of stainless steel (SS304 or SS430). The sample stage at the center is connected to the four sides by three beams for each.…”
Section: Separate-type High-speed Scannermentioning
confidence: 99%
See 1 more Smart Citation
“…For the XY scanner [ Fig. 1(a)], we used a flexure stage with four-fold symmetry, which is similar to the design reported by Hansma et al [9][10][11][12][13] The main body is made of stainless steel (SS304 or SS430). The sample stage at the center is connected to the four sides by three beams for each.…”
Section: Separate-type High-speed Scannermentioning
confidence: 99%
“…7 Hansma et al used a parallel flexure stage to enhance the resonance frequency of the XY scanner. [9][10][11] Subsequently, the design has been further improved by other researchers. 12, 13 Tabak et al developed a micrometer-sized Z scanner with an integrated tip for obtaining a high resonance frequency.…”
Section: Introductionmentioning
confidence: 99%
“…High-speed atomic force microscopy (HS-AFM) was established around 2008 1 through long-range efforts to increase the response speed of cantilevers, 2,3 the scanner, [4][5][6][7] and electronics, 1,2,8 as well as to make the high-speed performance compatible with low-invasiveness to fragile samples 9 (see reviews 1,10,11 ). This established HS-AFM has mainly been used to observe protein molecules in dynamic action at sub-100 ms to subsecond time resolution.…”
Section: Introductionmentioning
confidence: 99%
“…1 If the speed of imaging could be increased to the video rate, AFM would be regarded as one of the most elegant techniques for monitoring dynamic process such as crystallization and biological process in nanometer scale as well as fast nanolithography. [2][3][4][5][6][7][8] During the past decade, many efforts have been made in the technical areas including increasing lateral scanning speed, 7 improving the algorithm of feedback in z-direction, 9 designing new cantilever with smaller dimension, 10 and so forth.…”
Section: Introductionmentioning
confidence: 99%