Abstract-Recovery transients following blocking-state voltage stress are analyzed for two types of AlGaN/GaN HEMTs, one set of devices with thick AlGaN barrier layers and another with recessed-gate geometry and ALD SiO 2 gate dielectric. Results show temperature-invariant emission processes are present in both devices. Recessedgate devices with SiO 2 dielectrics are observed to exhibit simultaneous trapping and emission processes during poststress recovery.