Computer simulation of 2D multiple-level phase beamsplitter fabrication errors

Prokopenko, Sergei A.; Palagushkin, A. N.; Mikaelian, Andrei L.; Kiselyov, Boris S.; Shkitin, Vladimir A.

doi:10.1117/12.302469

Cited by 5 publications

(3 citation statements)

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“…We see that formula (2) does not allow us to use large apertures with short focal distances. This limitation can be overcome by using raster designs, that is, by uniting some multiple-focus structures and making a single phase array.…”

Section: Theorymentioning

confidence: 91%

“…The fabrication of multiple-focus visible-range CGHs needs high-precision formation of the phase relief: the profile depth should be good to 0.01µ µ µ µ and positioning accuracy to 0.1µ µ µ µ [2]. To provide this precision, we employ direct e-beam recording of the phase relief in the electron resist layer followed by chemical and plasma-chemical treatment [3].…”

Section: Theorymentioning

confidence: 99%

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<title>Array of holographic phase microelements providing given light patterns in the near field</title>

Mikaelian¹,

Palagushkin²,

Prokopenko³

2002

SPIE Proceedings

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The paper considers research and development of arrays of computergenerated multiple-focus phase microholograms for providing given light patterns in the near field zone. Peculiarities of such arrays are discussed. The main result of the talk is the fabrication of the microhologram array providing the given complex image in the focal plane The size of array was 1.54 mm x 1.54 mm, the size of each microhologram was 0.192 mm x 0.192 mm, and focal length -2 mm.

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Section: Theorymentioning

confidence: 91%

Section: Theorymentioning

confidence: 99%

<title>Array of holographic phase microelements providing given light patterns in the near field</title>

Mikaelian¹,

Palagushkin²,

Prokopenko³

2002

SPIE Proceedings

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show abstract

“…For the sake of precision N quantized phase level depth relief control the additional (N-1) meander-line phase structures were placed on the same substrate simultaneously with the CGH phase structure [4]. These additional structures were exhibited simultaneously with the CGH structure using dozes corresponding 1-st, 2-nd, ..., (N-1)-th phase level.…”

Section: Experimental Techniques Of Holographic Elements and Rastersmentioning

confidence: 99%

Array of multiple-focus holographic phase microelements

Mikaelian¹,

Prokopenko²,

Palagushkin³

2002

SPIE Proceedings

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tel. (095) 135-5551 fax. (095) 135-7802 E-mail: iont@postman.ru The paper considers research and development of arrays of computer-generated multiplefocus phase microholograms for providing given light patterns in the near field zone. Peculiarities of such arrays are discussed. The main result of the talk is the fabrication of the microhologram array providing the given complex image in the focal plane The size of array was 1.54 mm x 1.54 mm.

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