Computer simulation of hillock growth

Müller-Pfeiffer, S.; Anklam, H.‐J.

doi:10.1016/0042-207x(91)90090-6

Cited by 9 publications

(7 citation statements)

References 8 publications

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“…As a consequence, the shadowing effect results in the formation of open boundaries (Fig. 4(3)) between the metal layer covering the photoresist residues and the rest of the film coating the substrate because high points on the growing surface receive more material flux than valleys do, particularly when in addition a significant oblique component is present as it is the case in our process [16,20]. …”

Section: Resultsmentioning

confidence: 99%

“…The local self-shadowing effect at these nucleation sites is the main driving force promoting the formation of hillocks [17–19]. This nodular growth is characterized by the formation of hillocks emerging from the surface of the films with a conical shaped top originating from the narrow angular distribution of the flux of the species [20]. …”

Section: Introductionmentioning

confidence: 99%

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Dealloying of gold–copper alloy nanowires: From hillocks to ring-shaped nanopores

Chauvin¹,

Delacôte²,

Boujtita³

et al. 2016

Beilstein J. Nanotechnol.

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SummaryWe report on a novel fabrication approach of metal nanowires with complex surface. Taking advantage of nodular growth triggered by the presence of surface defects created intentionally on the substrate as well as the high tilt angle between the magnetron source axis and the normal to the substrate, metal nanowires containing hillocks emerging out of the surface can be created. The approach is demonstrated for several metals and alloys including gold, copper, silver, gold–copper and gold–silver. We demonstrate that applying an electrochemical dealloying process to the gold–copper alloy nanowire arrays allows for transforming the hillocks into ring-like shaped nanopores. The resulting porous gold nanowires exhibit a very high roughness and high specific surface making of them a promising candidate for the development of SERS-based sensors.

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Section: Resultsmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Dealloying of gold–copper alloy nanowires: From hillocks to ring-shaped nanopores

Chauvin¹,

Delacôte²,

Boujtita³

et al. 2016

Beilstein J. Nanotechnol.

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“…However, the model does not consider complex adsorption processes that influence film-structure evolution. Liao et al [15] and later Muller-Pheiffer et al e [16] upgraded the two-dimensional hard disk model in such a way that they included surface diffusion and desorption of arrived atoms. A more sophisticated ballistic model of coating growth, which takes into account scattering and surface diffusion of depositing species was developed by Lang and Xiuqin [50].…”

Section: Nodular Defectsmentioning

confidence: 99%

“…Using this model, the authors reproduced the parabolic shape as well as the open boundaries between a nodular defect and the coating matrix. In the beginning of the 1990s, Liao et al [15] and later Müller-Pheiffer et al [16] upgraded the two-dimensional model with an atom surface diffusion and desorption.…”

Section: Introductionmentioning

confidence: 99%

“…In this way, only a few growth defects could be analyzed since the observation of defects depended on sheer luck. Deeper knowledge on the internal structure of individual defects came with a focused ion beam (FIB) technique used together with SEM [12][13][14][15][16][17]. This technique allowed precise cross-section of an individual growth defect to examine its internal structure and to identify the seed for its formation.…”

Section: Introductionmentioning

confidence: 99%

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Review of Growth Defects in Thin Films Prepared by PVD Techniques

et al. 2020

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The paper summarizes current knowledge of growth defects in physical vapor deposition (PVD) coatings. A detailed historical overview is followed by a description of the types and evolution of growth defects. Growth defects are microscopic imperfections in the coating microstructure. They are most commonly formed by overgrowing of the topographical imperfections (pits, asperities) on the substrate surface or the foreign particles of different origins (dust, debris, flakes). Such foreign particles are not only those that remain on the substrate surface after wet cleaning procedure, but also the ones that are generated during ion etching and deposition processes. Although the origin of seed particles from external pretreatment of substrate is similar to all PVD coatings, the influence of ion etching and deposition techniques is rather different. Therefore, special emphasis is given on the description of the processes that take place during ion etching of substrates and the deposition of coating. The effect of growth defects on the functional properties of PVD coatings is described in the last section. How defects affect the quality of optical coatings, thin layers for semiconductor devices, as well as wear, corrosion, and oxidation resistant coatings is explained. The effect of growth defects on the permeation and wettability of the coatings is also shortly described.

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