Conductive Atomic Force Microscopy Probes from Pyrolyzed Parylene

Morton, Kirstin C.; Derylo, Maksymilian A.; Baker, Lane A.

doi:10.1149/2.061207jes

Cited by 5 publications

(7 citation statements)

References 36 publications

(40 reference statements)

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“…Parylene C was used as the deposition material and a four-step procedure was used to fabricate the carbon ring/nanopore electrode, as described previously. [33][34][35][36] Nanopipettes were placed in the deposition chamber of a parylene deposition system (PDS 2010, SCS coating, Indianapolis, IN) in an upright position and chemical vapor deposition of parylene C (PC) on the nanopipette surface was carried out with vaporizer and furnace temperature settings at 175 °C and 690 °C, respectively. PC-coated nanopipettes were then pyrolyzed at 900 °C under inert N 2 flow for 1 h to obtain pyrolyzed parylene C (PPC).…”

Section: Methodsmentioning

confidence: 99%

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Nanopipette delivery: influence of surface charge

Shi

Thakar

et al. 2015

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In this report, transport through a nanopipette is studied and the interplay between current rectification and ion delivery for small pipettes is examined. First, surface charge dependence of concentration polarization effects in a quartz nanopipette was investigated. Electrical characterization was performed through current-potential (I-V) measurements. In addition, fluorescein (an anionic fluorescent probe) was utilized to optically map ion enrichment and ion depletion in the nanopipette tip. Bare nanopipettes and polyethylenimine (PEI)-modified nanopipettes were examined. Results confirm that concentration polarization is a surface charge dependent phenomenon and delivery can be controlled through modification of surface charge. The relationship between concentration polarization effects and voltage-driven delivery of charged electroactive species was investigated with a carbon ring/nanopore electrode fabricated from pyrolyzed parylene C (PPC). Factors such as surface charge polarity of the nanopipette, electrolyte pH, and electrolyte concentration were investigated. Results indicate that with modification of surface charge, additional control over delivery of charged species can be achieved.

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Section: Methodsmentioning

confidence: 99%

“…Typical electrode configurations consisted of a carbon ring (200-300 nm thickness, pyrolyzed carbon) which surrounds an open pore (200 nm radius) at the tip of a quartz nanopipette. [33][34][35][36] An example of an electrode utilized in these studies is shown in Fig. 1a.…”

Section: Introductionmentioning

confidence: 99%

Nanopipette delivery: influence of surface charge

Shi

Thakar

et al. 2015

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“…Silicon substrates were washed with IPA and dried under a flow of nitrogen prior to chemical vapor deposition (CVD). Pyrolyzed parylene C was prepared, as described previously. , Briefly, CVD of parylene C onto silicon or copper was carried out in a commercial deposition system (Labcoater 2/PDS 2010, SCS Coatings), with 0.5–1.0 g of dimer used per run. Parylene C films were pyrolyzed on substrates in a tube furnace (Lindberg, Riverside, MI) at 900 °C for 1 h under constant flow of nitrogen to yield films of approximately 169 nm ± 30 nm (N = 3), measured via AFM.…”

Section: Experimental Sectionmentioning

confidence: 99%

“…13 Pyrolyzed parylene C (PPC) is a pyrocarbon utilized recently as a three-dimensional conductive carbon electrode material for nanopipettes 14 and atomic force microscopy probes. 15 However, little investigation of pyrocarbon chemical doping has been explored and investigations of pyrolytic carbon, as a component in semiconductor devices are limited. Pyrolyzed parylene C is an excellent material to construct not only planar semiconductor devices but also three-dimensional electrodes.…”

Section: ■ Introductionmentioning

confidence: 99%

Pyrolyzed Carbon Film Diodes

Morton

Tokuhisa

Baker

2013

ACS Appl. Mater. Interfaces

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We have previously reported pyrolyzed parylene C (PPC) as a conductive carbon electrode material for use with micropipets, atomic force microscopy probes, and planar electrodes. Advantages of carbon electrode fabrication from PPC include conformal coating of high-aspect ratio micro/nanoscale features and the benefits afforded by chemical vapor deposition of carbon polymers. In this work, we demonstrate chemical surface doping of PPC through the use of previously reported methods. Chemically treated PPC films are characterized by multiple spectroscopic and electronic measurements. Pyrolyzed parylene C and doped PPC are used to construct diodes that are examined as both p-n heterojunction and Schottky barrier diodes. Half-wave rectification is achieved with PPC diodes and demonstrates the applicability of PPC as a conductive and semiconductive material in device fabrication.

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“…30 Pyrolyzed parylene C (PPC) is an alternative approach to obtain carbon electrodes, and we have previously reported characterization and subsequent use of this amorphous carbon material for electrochemical applications. 22,50,51 Herein, we describe a simple yet versatile strategy for the fabrication of multifunctional geometries of carbon electrodes and their application to SECM and SICM. Chemical vapor deposition of parylene enables batch fabrication and forms a conformal coating over planar or highaspect ratio substrates that are pinhole-free.…”

Section: Introductionmentioning

confidence: 99%

Multifunctional carbon nanoelectrodes fabricated by focused ion beam milling

Thakar

Weber

Morris

et al. 2013

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We report a strategy for fabrication of sub-micron, multifunctional carbon electrodes and application of these electrodes as probes for scanning electrochemical microscopy (SECM) and scanning ion conductance microscopy (SICM). The fabrication process utilized chemical vapor deposition of parylene, followed by thermal pyrolysis to form conductive carbon and then further deposition of parylene to form an insulation layer. To achieve well-defined electrode geometries, two methods of electrode exposure were utilized. In the first method, carbon probes were masked in polydimethylsiloxane (PDMS) to obtain a cone-shaped electrode. In the second method, the electrode area was exposed via milling with a focused ion beam (FIB) to reveal a carbon ring electrode, carbon ring/platinum disk electrode, or carbon ring/nanopore electrode. Carbon electrodes were batch fabricated (~35/batch) through the vapor deposition process and were characterized with scanning electron microscopy (SEM), scanning transmission electron microscopy (STEM), and cyclic voltammetry (CV) measurements. Additionally, Raman spectroscopy was utilized to examine the effects of Ga(+) ion implantation, a result of FIB milling. Constant-height, feedback mode SECM was performed with conical carbon electrodes and carbon ring electrodes. We demonstrate the utility of carbon ring/nanopore electrodes with SECM-SICM to simultaneously collect topography, ion current and electrochemical current images. In addition, carbon ring/nanopore electrodes were utilized in substrate generation/tip collection (SG/TC) SECM. In SG/TC SECM, localized delivery of redox molecules affords a higher resolution, than when the redox molecules are present in the bath solution. Multifunctional geometries of carbon electrode probes will find utility in electroanalytical applications, in general, and more specifically with electrochemical microscopy as discussed herein.

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Conductive Atomic Force Microscopy Probes from Pyrolyzed Parylene

Cited by 5 publications

References 36 publications

Nanopipette delivery: influence of surface charge

Nanopipette delivery: influence of surface charge

Pyrolyzed Carbon Film Diodes

Multifunctional carbon nanoelectrodes fabricated by focused ion beam milling

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