Consecutive imprinting performance of large area UV nanoimprint lithography using Bi-layer soft stamps in ambient atmosphere

Si, Shuhao; Hoffmann, Martin

doi:10.1016/j.mee.2017.01.032

Cited by 13 publications

(5 citation statements)

References 18 publications

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“…The simple technological process of nanoimprinting also provides the possibility for the large-scale fabrication of nanostructures. However, the preparation process of the mask is relatively complex and deformation can easily occur in the processing procedure [121,122].…”

Section: Nanoimprintingmentioning

confidence: 99%

Nature-Inspired Structures Applied in Heat Transfer Enhancement and Drag Reduction

Zhu

Peng

et al. 2021

Micromachines

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Heat exchangers are general equipment for energy exchange in the industrial field. Enhancing the heat transfer of a heat exchanger with low pump energy consumption is beneficial to the maximum utilization of energy. The optimization design for enhanced heat transfer structure is an effective method to improve the heat transfer coefficient. Present research shows that the biomimetic structures applied in different equipment could enhance heat transfer and reduce flow resistance significantly. Firstly, six biomimetic structures including the fractal-tree-like structure, conical column structure, hybrid wetting structure, scale structure, concave-convex structure and superhydrophobic micro-nano structure were summarized in this paper. The biomimetic structure characteristics and heat transfer enhancement and drag reduction mechanisms were analyzed. Secondly, four processing methods including photolithography, nanoimprinting, femtosecond laser processing and 3D printing were introduced as the reference of biomimetic structure machining. Finally, according to the systemic summary of the research review, the prospect of biomimetic heat transfer structure optimization was proposed.

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Section: Nanoimprintingmentioning

confidence: 99%

Nature-Inspired Structures Applied in Heat Transfer Enhancement and Drag Reduction

Zhu

Peng

et al. 2021

Micromachines

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“…It can be conducted outside of the clean room at a low cost and with a facile process. Si et al made a large area (25 cm 2 ) device in the ambient atmosphere using polydimethylsiloxane (PDMS) molds [175]. This overcomes the challenges caused by the oxygen-containing atmosphere.…”

Section: Mold Typementioning

confidence: 99%

Scalable and High-Throughput Top-Down Manufacturing of Optical Metasurfaces

Lee

et al. 2020

Sensors

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Metasurfaces have shown promising potential to miniaturize existing bulk optical components thanks to their extraordinary optical properties and ultra-thin, small, and lightweight footprints. However, the absence of proper manufacturing methods has been one of the main obstacles preventing the practical application of metasurfaces and commercialization. Although a variety of fabrication techniques have been used to produce optical metasurfaces, there are still no universal scalable and high-throughput manufacturing methods that meet the criteria for large-scale metasurfaces for device/product-level applications. The fundamentals and recent progress of the large area and high-throughput manufacturing methods are discussed with practical device applications. We systematically classify various top-down scalable patterning techniques for optical metasurfaces: firstly, optical and printing methods are categorized and then their conventional and unconventional (emerging/new) techniques are discussed in detail, respectively. In the end of each section, we also introduce the recent developments of metasurfaces realized by the corresponding fabrication methods.

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“…The power of nanotechnology is that it offers novel high resolution nanopatterning techniques to overcome the restrictions of conventional lithography [ 1 , 2 ]. With that purpose, several lithographic methods have been developed in the past, including those based on scanning probe microscopy (SPM) (scanning probe lithography [ 3 ], nano stencil lithography [ 4 , 5 ], dip-pen nanolithography [ 6 , 7 ]) and methods based on stamps or masks (soft-lithography [ 8 ], nanoimprinting [ 9 ], nano sphere lithography [ 10 , 11 , 12 ], and unconventional wet lithography [ 13 , 14 ]), nanoimprint lithography (NIL), [ 15 , 16 ] and electrochemical lithography [ 17 ]. These methods offer important advantages, such as high efficiency (soft and nano sphere lithography), suitability for large areas (soft, unconventional lithography and nanoimprinting), a few nanometers resolution (nanoimprinting, scanning probe lithography, nanostencil, and dip-pen nanolithography), high versatility (soft unconventional lithography and nanoimprinting), and direct processability of solutions (soft and unconventional lithography).…”

Section: Introductionmentioning

confidence: 99%

Giant Strain and Induced Ferroelectricity in Amorphous BaTiO3 Films under Poling

et al. 2017

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Abstract:We report an effect of giant surface modification of a 5.6 nm thick BaTiO 3 film grown on Si (100) substrate under poling by conductive tip of a scanning probe microscope (SPM). The surface can be locally elevated by about 9 nm under −20 V applied during scanning, resulting in the maximum strain of 160%. The threshold voltage for the surface modification is about 12 V. The modified topography is stable enough with time and slowly decays after poling with the rate~0.02 nm/min. Strong vertical piezoresponse after poling is observed, too. Combined measurements by SPM and piezoresponse force microscopy (PFM) prove that the poled material develops high ferroelectric polarization that cannot be switched back even under an oppositely oriented electric field. The topography modification is hypothesized to be due to a strong Joule heating and concomitant interface reaction between underlying Si and BaTiO 3 . The top layer is supposed to become ferroelectric as a result of local crystallization of amorphous BaTiO 3 . This work opens up new possibilities to form nanoscale ferroelectric structures useful for various applications.

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Consecutive imprinting performance of large area UV nanoimprint lithography using Bi-layer soft stamps in ambient atmosphere

Cited by 13 publications

References 18 publications

Nature-Inspired Structures Applied in Heat Transfer Enhancement and Drag Reduction

Nature-Inspired Structures Applied in Heat Transfer Enhancement and Drag Reduction

Scalable and High-Throughput Top-Down Manufacturing of Optical Metasurfaces

Giant Strain and Induced Ferroelectricity in Amorphous BaTiO3 Films under Poling

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