Selective microwave heating and irradiation reportedly have a significant impact on the relative volatility of polar/nonpolar mixtures. However, the use of this feature for a separation process has not yet been reported. In this article, a microwave‐induced film evaporation process based on a nonequilibrium process was developed to separate polar/nonpolar mixtures. The influencing mechanism of microwaves on the separation of a polar/nonpolar system was studied by comparing the experimental results in the presence/absence of microwave irradiation. The influences of several operating parameters, such as the initial composition, temperature, residence time, and microwave power density, were explored. The results clearly demonstrate that microwave irradiation can improve the polar component vaporization and shift the vapor phase composition. The results also indicate that the differences in the dielectric properties play a significant role in the effect of microwave irradiation on a film evaporation separation process. © 2018 American Institute of Chemical Engineers AIChE J, 65: 745–754, 2019