“…Being a strong contender for resistive switching memories, transition metal oxides (TMO), 8) especially binary oxides, have been investigated recently. Among other various oxides such as HfO x , [9][10][11][12] WO x , [13][14][15] ZrO 2 , [16][17][18] CoO, 19,20) TiO 2 , [21][22][23][24] CuO, 25,26) Ta 2 O 5 , [27][28][29][30][31] NiO, 32) Nb 2 O 5 , 33) and AlO x , [34][35][36] tantalum oxide (TaO x )-based devices are becoming attractive owing to their ease of deposition using existing conventional systems, high thermal stability, compatibility with CMOS processes and high dielectric constant (" r $ 25). Commonly, the use of platinum (Pt) as an electrode material in a Pt/Ta 2 O 5 /Pt structure 28) is reported for RRAM applications owing to its high work function and inertness.…”