over decades. Oxychalcogenides, which can be regarded as mixing and bridging chalcogenides and oxides together, reactivate their research booms for the remarkable phenomena such as high carrier mobility, [9] thermoelectricity, [10][11][12] ferroelectricity, [13] and superconductivity. [14] Bi 2 O 2 Se, a representative of oxychalcogenides family, emerged as an air-stable highmobility layered semiconductor, which holds promise for next-generation digital devices and optoelectronics. [2,9,13,[15][16][17][18][19][20][21][22][23] For example, the bulk Bi 2 O 2 Se crystals show an ultrahigh Hall mobility of ≈280 000 cm 2 V −1 s −1 at low temperature [9] and robust bandgap (immune to Se vacancies) after cleavage. [17] Nanoplates and thin films of Bi 2 O 2 Se were successfully prepared by chemical vapor deposition (CVD), [9,15,21,23] displaying excellent switching behavior of I on /I off and high Hall mobility (up to 450 cm 2 V −1 s −1 ) at room temperature. Outstanding optoelectronic properties were recently observed in CVD-grown Bi 2 O 2 Se nanoplates. [16,18,[23][24][25] The present research is mainly focused on the bulk crystals and few-layer or multiplayer samples due to the challenge to faithfully achieve the growth of atomically thin Bi 2 O 2 Se films. The atomically thin counterpart down to one-unit-cell (1-UC) Atomically thin oxychalcogenides have been attracting intensive attention for their fascinating fundamental properties and application prospects. Bi 2 O 2 Se, a representative of layered oxychalcogenides, has emerged as an air-stable high-mobility 2D semiconductor that holds great promise for next-generation electronics. The preparation and device fabrication of high-quality Bi 2 O 2 Se crystals down to a few atomic layers remains a great challenge at present.
Here, molecular beam epitaxy (MBE) of atomically thin Bi 2 O 2 Se films down to monolayer on SrTiO 3 (001) substrate is achieved by co-evaporating Bi andSe precursors in oxygen atmosphere. The interfacial atomic arrangements of MBE-grown Bi 2 O 2 Se/SrTiO 3 are unambiguously revealed, showing an atomically sharp interface and atom-to-atom alignment. Importantly, the electronic band structures of one-unit-cell (1-UC) thick Bi 2 O 2 Se films are observed by angle-resolved photoemission spectroscopy (ARPES), showing low effective mass of ≈0.15 m 0 and bandgap of ≈0.8 eV. These results may be constructive to the synthesis of other 2D oxychalcogenides and investigation of novel physical properties.
Ultrathin FilmsThanks to their rich physics and fascinating application prospects, atomically thin metal oxides/chalcogenides (sulfide, selenide, or telluride) and their heterostructures, such as transition metal dichalcogenides (TMDs), [1,2] superconducting β-phase FeSe, [3,4] topological insulator (Bi 2 Se 3 , Bi 2 Te 3 ), [5,6] and LaAlO 3 /SrTiO 3 , [7,8] have been attracting tremendous interest