2015
DOI: 10.1088/0960-1317/25/4/045016
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Converse mode piezoelectric coefficient for lead zirconate titanate thin film with interdigitated electrode

Abstract: The use of interdigitated electrodes (IDEs) in conjunction with ferroelectric thin films shows many attractive features for piezoelectric MEMS applications. In this work, growth of {1 0 0}-textured lead zirconate titanate (PZT) thin films was achieved on insulating MgO buffered, oxidized silicon substrates. IDEs were fabricated by lift-off techniques and cantilevers were formed by dicing. The deflection upon application of a sweeping voltage was measured as large signal response in parallel to the ferroelectri… Show more

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Cited by 17 publications
(15 citation statements)
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“…The remanent polarization P r and coercive field E c of these transparent structures are 18 µC cm −2 and 35 kV cm −1 , respectively ( Figure a), which are comparable to state‐of‐the‐art PZT thin films in IDE configuration with metal electrodes. [ 41 ] The zero‐field permittivity ε′ value is 930 with losses of 0.05 and both exhibit a characteristic butterfly loop in their bias‐field‐dependencies (Figure 4b). The converse piezoelectric coefficient e 33,f , measured at large field in cantilever configuration in positive direction, [ 42,43 ] is 8.0 C m −2 .…”
Section: Electromechanical Characterization Of the Transparent Capacitorsmentioning
confidence: 99%
“…The remanent polarization P r and coercive field E c of these transparent structures are 18 µC cm −2 and 35 kV cm −1 , respectively ( Figure a), which are comparable to state‐of‐the‐art PZT thin films in IDE configuration with metal electrodes. [ 41 ] The zero‐field permittivity ε′ value is 930 with losses of 0.05 and both exhibit a characteristic butterfly loop in their bias‐field‐dependencies (Figure 4b). The converse piezoelectric coefficient e 33,f , measured at large field in cantilever configuration in positive direction, [ 42,43 ] is 8.0 C m −2 .…”
Section: Electromechanical Characterization Of the Transparent Capacitorsmentioning
confidence: 99%
“…Finally, a clear ferroelectric behaviour is observed on the polarization-electric field (P-E) loop of PZT on glass with AZO electrodes, as shown in Figure 5 . The extracted value of remanent polarization P r is 15 μC/cm 2 , which is approximately half the value reported for 500-nm-thick (100) MPB PZT on Si with Pt IDE electrodes, but comparable to its counterpart in MIM geometry [ 17 ]. The calculated coercive field E c is 52 kV/cm.…”
Section: Resultsmentioning
confidence: 79%
“…The amplitude of each strain response is different from the others. Therefore, during the preparation of the IEPCM, it is essential to ensure the positive and negative electrodes of the IEPCM are symmetric as far as possible, including the main branch corresponding to the positive and negative electrode branches [28].…”
Section: Transient Response Analysis Of Iepcmmentioning
confidence: 99%
“…Owing to interdigitated electrode (IE) technology, the polarization direction of the piezoelectric device with IEs is the same as the voltage-driving one, rendering a great improvement of the in-plane strain/stress-driving capacity, and obvious orthotropic features [22][23][24][25][26][27][28]. Zhang et al [22] documented that the 1-3 type PCM with IEs possessed a high piezoelectric constant and superior orthotropic features with different receiving sensitivities for the stress waves from orthogonal directions.…”
Section: Introductionmentioning
confidence: 99%
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