Transparent Ferroelectric Capacitors on Glass

Sette, D.; Girod, Stéphanie; Leturcq, R.; Glinšek, Sebastjan; Defaÿ, E.

doi:10.3390/mi8100313

Cited by 11 publications

(6 citation statements)

References 19 publications

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“…[ 12,13 ] Being an insulator with an optical gap of ≈3.4 eV, PZT is transparent. [ 14–16 ] However, integrating PZT‐based transparent actuators on glass is challenging. The main obstacles arise from the diffusion of Pb into the substrate, [ 17 ] relatively low strain‐points of typical commercial glasses (<500 °C for standard soda‐lime glasses), and the absence of crystallographic matching for {100} growth of PZT.…”

Section: Introductionmentioning

confidence: 99%

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Fully Transparent Friction‐Modulation Haptic Device Based on Piezoelectric Thin Film

Glinšek

Mahjoub

Rupin³

et al. 2020

Adv Funct Materials

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Standing Lamb waves in vibrating plates enable haptic interfaces. If the out‐of‐plane displacement of these waves exceeds 1 µm at frequencies above 25 kHz, a silent friction modulation can be created between a human finger and a vibrating plate. A fully transparent friction‐modulation haptic device based on a piezoelectric thin film is demonstrated. The antisymmetric Lamb mode induced at 73 kHz allows for a functional performance that fulfills all conditions for practical use. Out‐of‐plane displacement reaches 2.9 µm when 150 V unipolar voltage is applied. The average transmittance of the whole transducer reaches 75%. The key points of this technology are: 1) a thin HfO2 layer between lead zirconate titanate film and substrate that prevents chemical reaction between them; 2) the efficient integration of transparent indium tin oxide electrodes and solution‐derived piezoelectric lead zirconate titanate thin film onto optical‐grade fused silica; and 3) the use of a transparent insulating layer made of SU‐8 photoresist.

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Section: Introductionmentioning

confidence: 99%

“…Randomly oriented 800‐nm‐thick PZT films with metal IDE electrodes showed ferroelectric response with a P r value of 20 µC cm −2 , which is comparable to standard values in MIM geometry on platinized silicon substrates. [ 15,32 ]…”

Section: Introductionmentioning

confidence: 99%

Fully Transparent Friction‐Modulation Haptic Device Based on Piezoelectric Thin Film

Glinšek

Mahjoub

Rupin³

et al. 2020

Adv Funct Materials

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“…This simplifies the integration of transparent PZT on glass. Defay's group successfully employed this solution for realizing fully transparent functional frictionmodulation haptic device based on PZT and ITO films deposited on fused silica [7,19]. The main drawback of their technology is the high driving voltage required using IDE electrodes that can be detrimental for some applications.…”

Section: Introductionmentioning

confidence: 99%

Highly transparent PZT capacitors on glass obtained by layer transfer process

Rhun

Pavageau

Wagué

et al. 2022

J Mater Sci: Mater Electron

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Transparent ITO/PZT/ITO capacitors were fabricated on 200 mm glass substrate. The PZT films of 1 µm and 2 µm thickness were first grown on platinized Si wafer by sol-gel method, and then transferred onto glass substrate together with ITO electrodes following an innovative process. The obtained PZT based stacks on glass show an average transmission of about 70 % in the visible range. PZT films keep their preferred (100) orientation after transfer process. The capacitors exhibit ferroelectric, dielectric and piezoelectric properties comparable to standard non-transparent PZT films with metal electrodes. Transverse piezoelectric coefficient e31,f as high as 16 C/m² was measured for both PZT film thicknesses. This proof of concept opens the way to the fabrication of transparent piezoelectric actuators on glass for high performances haptic devices, as well as for other emerging applications like self-cleaning or functionalization of smart windows.

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“…In general, the electrode structures of SCs can be classified into three types: interdigital [ 16 , 17 , 18 ], sandwich [ 19 , 20 ], and roll [ 21 , 22 ]. In-plane interdigital design of electrodes possesses some advantages over the other two designs.…”

Section: Introductionmentioning

confidence: 99%

Micromachined Planar Supercapacitor with Interdigital Buckypaper Electrodes

Chen

Chang

et al. 2018

Micromachines

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In this work, a flexible micro-supercapacitor with interdigital planar buckypaper electrodes is presented. A simple fabrication process involving vacuum filtration method and SU-8 molding techniques is proposed to fabricate in-plane interdigital buckypaper electrodes on a membrane filter substrate. The proposed process exhibits excellent flexibility for future integration of the micro-supercapacitors (micro-SC) with other electronic components. The device’s maximum specific capacitance measured using cyclic voltammetry was 107.27 mF/cm2 at a scan rate of 20 mV/s. The electrochemical stability was investigated by measuring the performance of charge-discharge at different discharge rates. Devices with different buckypaper electrode thicknesses were also fabricated and measured. The specific capacitance of the proposed device increased linearly with the buckypaper electrode thickness. The measured leakage current was approximately 9.95 µA after 3600 s. The device exhibited high cycle stability, with 96.59% specific capacitance retention after 1000 cycles. A Nyquist plot of the micro-SC was also obtained by measuring the impedances with frequencies from 1 Hz to 50 kHz; it indicated that the equivalent series resistance value was approximately 18 Ω.

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Transparent Ferroelectric Capacitors on Glass

Cited by 11 publications

References 19 publications

Fully Transparent Friction‐Modulation Haptic Device Based on Piezoelectric Thin Film

Fully Transparent Friction‐Modulation Haptic Device Based on Piezoelectric Thin Film

Highly transparent PZT capacitors on glass obtained by layer transfer process

Micromachined Planar Supercapacitor with Interdigital Buckypaper Electrodes

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