2019
DOI: 10.1002/pssb.201900682
|View full text |Cite
|
Sign up to set email alerts
|

Correlation between Hall Mobility and Optical Mobility in Aluminum‐Doped ZnO Films via Boundary Scatterings and Estimation of Donor Compensation Ratio

Abstract: A correlation between the Hall and optical mobility via boundary (BND) scatterings arising from grain as well as surface boundaries in radio frequency (RF) sputtered Al-doped ZnO (AZO) films done by a comprehensive study on the electrical carrier transport and near infrared optical transmittance properties. AZO films with thicknesses from 100 to 1550 nm are grown by sputtering 1.9 wt% Al 2 O 3 -doped ceramic target under identical growth conditions. The Hall measurement shows an increase in the carrier concent… Show more

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
3
1

Citation Types

1
3
0

Year Published

2021
2021
2024
2024

Publication Types

Select...
6

Relationship

1
5

Authors

Journals

citations
Cited by 11 publications
(4 citation statements)
references
References 39 publications
1
3
0
Order By: Relevance
“…It can be seen that the most doped sample (50 cm of Al) resulted in the lowest crystallite size value and higher presence of concentrations of defects or vacancies, which can be related to the replacement of Zn 2+ with 0.73 Å by Al 3+ with 0.53 Å 30 . Other works in the literature with thicknesses similar to our work obtained resistivity in the range of 10 3 Ω cm 13,40 . In these works, the AZO films were first deposited using the r.f.…”
Section: Resultssupporting
confidence: 67%
See 1 more Smart Citation
“…It can be seen that the most doped sample (50 cm of Al) resulted in the lowest crystallite size value and higher presence of concentrations of defects or vacancies, which can be related to the replacement of Zn 2+ with 0.73 Å by Al 3+ with 0.53 Å 30 . Other works in the literature with thicknesses similar to our work obtained resistivity in the range of 10 3 Ω cm 13,40 . In these works, the AZO films were first deposited using the r.f.…”
Section: Resultssupporting
confidence: 67%
“…30 Other works in the literature with thicknesses similar to our work obtained resistivity in the range of 10 3 Ω cm. 13,40 In these works, the AZO films were first deposited using the r.f. sputtering technique using Al 2 O 3 -doped ZnO ceramic targets deposited at different temperatures and then annealed after deposition.…”
Section: Study Of the Composition Of Azo Filmsmentioning
confidence: 99%
“…Moreover, a shift toward the lower 2 θ value of the (002) peak was observed for Ti doping and became more prominent for higher Ti deposition power as shown in the inset of Figure 1c, which may be due to the generation of tensile strain. [ 43 ] No other peak for Ti or TiO 2 is detected, indicating the successful doping of Ti atoms into the hexagonal ZnO lattice by the co‐sputtering technique.…”
Section: Resultsmentioning
confidence: 99%
“…The reason why the lattice constant increases with increasing In doping concentration is the difference between the ionic radii of Zn 2+ (0.74 Å) and In 3+ (0.81 Å). [ 56,57 ] In addition, the strain value in the IZO films along the c ‐axis can be calculated by following formula [ 58 ] εzz=(cc0)/c0×100where εzz is the strain value, c is the c ‐axis lattice constant, and c 0 is the strain‐free lattice parameter of ZnO (5.2066 Å). The positive strain represents the tensile strain when the IZO films are stretched, whereas the negative strain value represents the compressive strain when the IZO films are compressed.…”
Section: Resultsmentioning
confidence: 99%