2016
DOI: 10.1109/jsen.2015.2466467
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Correlation Between Optical, Morphological, and Compositional Properties of Aluminum Nitride Thin Films by Pulsed Laser Deposition

Abstract: AlN thin films were grown in a N2 atmosphere onto a Si/Si3N4 substrate by pulsed laser ablation. We have varied the substrate temperature for the thin film growth, using X-ray Reflectometry (XRR) analysis, we have characterized the thickness and density of the thin layer and the interface roughness from the X-ray reflectivity profiles. Experimental data showed that the root-mean-square roughness was in the range of 0.3 nm. X-ray photoelectron spectroscopy (XPS) was employed to characterize the chemical composi… Show more

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Cited by 34 publications
(13 citation statements)
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“…In the same way, the N 1s spectrum was deconvoluted with two peaks as described in Figure 5 b. It showed one main peak centered at a BE of 397.4 eV, corresponds to N in Al–N, and the other at 398.6 eV, corresponds to the BE of unbounded nitrogen [ 43 ].…”
Section: Resultsmentioning
confidence: 99%
“…In the same way, the N 1s spectrum was deconvoluted with two peaks as described in Figure 5 b. It showed one main peak centered at a BE of 397.4 eV, corresponds to N in Al–N, and the other at 398.6 eV, corresponds to the BE of unbounded nitrogen [ 43 ].…”
Section: Resultsmentioning
confidence: 99%
“…A decrease in the density of nitrogen vacancies is confirmed by the N 1s XPS spectra of the AlN passivation layers, as shown in Figure . The XPS signals were decomposed into the peaks corresponding to the lattice nitrogen (397 eV) and nitrogen vacancies (398.3 eV), respectively. , It can be seen that the amount of nitrogen vacancies in the AlN passivation layer treated by the ALB process is less than that prepared without the ALB treatment. The lower density of nitrogen vacancies is consistent with the higher film density due to atomic layer densification caused by the ALB treatment.…”
Section: Resultsmentioning
confidence: 99%
“…The N 1s spectrum exhibited a peak at ≈397.5 eV which can be assigned to WN bonding. Moreover, we found another peak at ≈399.0 eV which could be contributed to nitrogen atoms near the nitrogen vacancies(Figure b) . To shed light on the local atomic arrangement and specific bonding modes of 2D h ‐W 2 N 3 nanosheets, synchrotron radiation X‐ray absorption fine structure (XAFS) measurements at the W L 3 ‐edge were performed.…”
Section: Exafs Curve‐fitting Resultsmentioning
confidence: 99%