Correlation between target–substrate distance and oxygen pressure in pulsed laser deposition of complex oxide thin films

Castro-Rodrı́guez, R.; Coronado, David Reyes; Iribarren, A.; Watts, B.E.; Leccabue, F.; Peña, J. L.

doi:10.1007/s00339-005-3302-5

Cited by 15 publications

(7 citation statements)

References 10 publications

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“…Target-substrate distance has been shown to influence the texture, orientation, and crystallite size of thin films such as the superconducting oxide YBa 2 Cu 3 O 7 [16][17][18][19][20]. Each value of O 2 background pressure possesses a corresponding optimal targetsubstrate distance.…”

Section: Introductionmentioning

confidence: 98%

Cation uniformity and magnetic properties of La0.7Sr0.3Mn0.5Fe0.5O3 thin films

Yang

Arenholz

et al. 2013

Journal of Magnetism and Magnetic Materials

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Section: Introductionmentioning

confidence: 98%

Cation uniformity and magnetic properties of La0.7Sr0.3Mn0.5Fe0.5O3 thin films

Yang

Arenholz

et al. 2013

Journal of Magnetism and Magnetic Materials

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“…[1][2][3][4] Interaction of ultrafast laser beams with materials can be exploited as a source of high-energy radiation such as extreme ultraviolet and X-rays. 5,6 Other potential applications of pulsed LA of materials include micro-machining, 7,8 nanoparticle synthesis, 9,10 polymer fabrication, 11 film growth by pulsed laser deposition, [12][13][14] and elemental analysis. [15][16][17][18] The LPPs are highly transient and dynamic in nature.…”

Section: Introductionmentioning

confidence: 99%

Dynamics of plasma expansion and shockwave formation in femtosecond laser-ablated aluminum plumes in argon gas at atmospheric pressures

et al. 2014

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Plasma expansion with shockwave formation during laser ablation of materials in a background gasses is a complex process. The spatial and temporal evolution of pressure, temperature, density, and velocity fields is needed for its complete understanding. We have studied the expansion of femtosecond (fs) laser-ablated aluminum (Al) plumes in Argon (Ar) gas at 0.5 and 1 atmosphere (atm). The expansion of the plume is investigated experimentally using shadowgraphy and fast-gated imaging. The computational fluid dynamics (CFD) modeling is also carried out. The position of the shock front measured by shadowgraphy and fast-gated imaging is then compared to that obtained from the CFD modeling. The results from the three methods are found to be in good agreement, especially during the initial stage of plasma expansion. The computed time-and spaceresolved fields of gas-dynamic parameters have provided valuable insights into the dynamics of plasma expansion and shockwave formation in fs-pulse ablated Al plumes in Ar gas at 0.5 and 1 atm. These results are compared to our previous data on nanosecond (ns) laser ablation of Al [S. S. Harilal et al., Phys. Plasmas 19, 083504 (2012)]. It is observed that both fs and ns plumes acquire a nearly spherical shape at the end of expansion in Ar gas at 1 atm. However, due to significantly lower pulse energy of the fs laser (5 mJ) compared to pulse energy of the ns laser (100 mJ) used in our studies, the values of pressure, temperature, mass density, and velocity are found to be smaller in the fs laser plume, and their time evolution occurs much faster on the same time scale. The oscillatory shock waves clearly visible in the ns plume are not observed in the internal region of the fs plume. These experimental and computational results provide a quantitative understanding of plasma expansion and shockwave formation in fs-pulse and ns-pulse laser ablated Al plumes in an ambient gas at atmospheric pressures. V

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“…The plasma freezes out beyond a characteristic distance (D) due to interaction of plasma plume with the background gas so that flux thermalizes and loses its unidirectional velocity. The quantitative understanding of the Pressure-Distance scaling relationship can be obtained with the help of blastwave model [28], but we have used the qualitative model [29,30] in this work. If N 0 atoms absorb the laser radiation and are ejected from a point source (D=0) into a background gas, the plasma distribution can be approximated to a diverging cone such that its volume is D 3 /3.…”

Section: Methodsmentioning

confidence: 99%

Optimization of substrate-target distance for pulsed laser deposition of tungsten oxide thin films using Langmuir probe

et al. 2015

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The paper investigates the spatial and temporal variation of laser produced plasma of tungsten oxide using a Langmuir probe. The plasma was produced by laser ablation of tungsten oxide target using an Excimer laser of wavelength 248 nm. Our experimental studies confirmed that oxygen partial pressure (P) of 2 × 10 −2 mbar is sufficient enough to get stoichiometric tungsten oxide thin films and the plume dynamics was diagnosed for their spatial and temporal behaviour at the above optimised oxygen pressure. Spatial distribution was recorded with the target to substrate distance (D) ranging from the target position to a distance of 75 mm away from the target, whereas the temporal variation was taken in the range of 0-50 µS with an interval of 0.5 µS. The average electron densities were found to be maximum at 30 mm from the target position. However, ion density was constant beyond the probe distance of 45 mm from the target. The plasma current was found to be maximum at 28 µS. The target to substrate distance was optimized for homogenous adherent good quality thin films using plasma parameters such as ion density and average electron density obtained at different oxygen pressure. The target distance and background gas pressure were correlated as PD scaling law and fitted as PD 3 in the model.

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Correlation between target–substrate distance and oxygen pressure in pulsed laser deposition of complex oxide thin films

Cited by 15 publications

References 10 publications

Cation uniformity and magnetic properties of La0.7Sr0.3Mn0.5Fe0.5O3 thin films

Cation uniformity and magnetic properties of La0.7Sr0.3Mn0.5Fe0.5O3 thin films

Dynamics of plasma expansion and shockwave formation in femtosecond laser-ablated aluminum plumes in argon gas at atmospheric pressures

Optimization of substrate-target distance for pulsed laser deposition of tungsten oxide thin films using Langmuir probe

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