Cost-effective SU-8 micro-structures by DUV excimer laser lithography for label-free biosensing

Sanza, Francisco J.; Heras, María Fe Laguna; Casquel, Rafael; Holgado, Miguel; Barrios, Carlos Angulo; Ortega, Francisco; López-Romero, D.; García–Ballesteros, J.J.; Bañuls, María‐José; Maquieira, Ángel; Puchades, Rosa

doi:10.1016/j.apsusc.2010.10.010

Cited by 14 publications

(18 citation statements)

References 40 publications

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“…We employed a spot size of 1x1 mm to cover the whole BICELL previously reported in characterizing BICELLs [7,15]. Thus, the sensing areas considered for RPL and Spectrometry are not the same and may involve small differences in the immunoassay results.…”

Section: Resultsmentioning

confidence: 99%

“…We have fabricated several arrays of BICELLs by using UV lithography through a polymeric mask, with an experimental process described by Sanza et al [15], but using an UV light source instead of an excimer laser for the polymerization. We fabricated four different arrays over a silicon chip of 10x10 mm, each of them containing four square BICELLs of 1x1 mm.…”

Section: Resultsmentioning

confidence: 99%

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Sub-micrometric reflectometry for localized label-free biosensing

Casquel¹,

Soler²,

Holgado³

et al. 2015

Opt. Express

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In this work we present an optical technique for characterizing sub-micrometric areas based on reflectivity of the light as a function of angle of incidence for the two pure polarizations s and p, covering a range of angles of incidence from −71.80° to 71.80° with a resolution of 0.1°. Circular areas with a diameter in the order of 600 nm can be characterized, and the spectra for the two polarizations can be obtained with a single measurement. For biosensing purposes, we have fabricated several Bio Photonic Sensing Cells (BICELLs) consisting of interferometers of 1240 nm of SU-8 polymer over silicon. An indirect immunoassay is performed over these BICELLs and compared experimentally with FT-VIS-NIR spectrometry and theoretical calculations. The Limit of Detection (LoD) achieved is comparable with standard high resolution spectrometry, but with the capability of analyzing sub-micrometric domains for immunoassays reactions onto a sensing surface.

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Section: Resultsmentioning

confidence: 99%

Section: Resultsmentioning

confidence: 99%

Sub-micrometric reflectometry for localized label-free biosensing

Casquel¹,

Soler²,

Holgado³

et al. 2015

Opt. Express

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“…The main advantages of the proposed method against the approaches already described in the literature [16][17][18][19][20]23,[26][27][28][29][30][31] for the biofunctionalization of SU-8 include the spatial discrimination -obtained by irradiating only on the desired areas -, the suitability to be incorporated within the SU-8 polymer standard fabrication protocol -thus saving time and cost -, and the versatility of the surface obtained, as any biotinylated receptor can be attached to the surface by a streptavidine bridge.…”

Section: 33mentioning

confidence: 99%

Development of a versatile biotinylated material based on SU-8

et al. 2013

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The negative epoxy-based SU-8 photoresist has a wide variety of applications within the semiconductor industry, photonics and lab-on-a-chip devices, and it is emerging as an alternative to silicon-based devices for sensing purposes. In the present work, biotinylation of the SU-8 polymer surface promoted by light is reported. As a result, a novel, effective, and low-cost material, focusing on the immobilization of bioreceptors and consequent biosensing, is developed. This material allows the spatial discrimination depending on the irradiation of desired areas. The most salient feature is that the photobiotin may be directly incorporated into the SU-8 curing process, consequently reducing time and cost. The potential use of this substrate is demonstrated by the immunoanalytical detection of the synthetic steroid gestrinone, showing excellent performances. Moreover, the naked eye biodetection due to the transparent SU-8 substrate, and simple instrumental quantification are additional advantages.

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“…In order to characterize the optical response of each array of RNPs, we used a high-resolution FT-VIS-NIR Spectrometer (Bruker VERTEX 70) [10,11]. A layout of the optical integration setup can be observed in Fig.…”

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confidence: 99%

Arrays of resonant nanopillars for biochemical sensing

et al. 2015

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In this Letter, we demonstrate for the first time the experimental capability for the biochemical sensing of resonant nanopillars (RNPs) arrays. These arrays are fabricated over a glass substrate and are optically integrated from the backside of this substrate. The reflectivity profiles of the RNPs arrays are measured by infiltrating different ethanol fractions in water in order to evaluate the optical response for the different refractive indexes, which range from 1.330 to 1.342. A linear fit of the resonant modes shift is observed as a function of the bulk refractive index of the liquid infiltrated. For the type of transducer analyzed, a relative sensitivity of 10017 cm(-1)/Refractive Index Unit (RIU) is achieved, allowing us to reach a competitive Limit of Detection (LoD) in the order of 1×10(-5) RIU.

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Cost-effective SU-8 micro-structures by DUV excimer laser lithography for label-free biosensing

Cited by 14 publications

References 40 publications

Sub-micrometric reflectometry for localized label-free biosensing

Sub-micrometric reflectometry for localized label-free biosensing

Development of a versatile biotinylated material based on SU-8

Arrays of resonant nanopillars for biochemical sensing

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