Creating large out-of-plane displacement electrothermal motion stage by incorporating beams with step features

Kim, Yong-Sik; Dagalakis, Nicholas G.; Gupta, Satyandra K.

doi:10.1088/0960-1317/23/5/055008

Cited by 20 publications

(14 citation statements)

References 28 publications

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“…[13]- [16], electrothermal [17]- [20], piezoelectric [21]- [23] and electromagnetic actuations [24]- [28]. The electrostatic actuation has the advantages of low power consumption, high efficiency, high compatibility with semiconductor process, simple and diverse structure.…”

Section: Electrostaticmentioning

confidence: 99%

A Two-Row Interdigitating-Finger Repulsive-Torque Electrostatic Actuator and Its Application to Micromirror Vector Display

Fan

2015

J. Microelectromech. Syst.

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This paper presents a novel two-row interdigitatingfinger repulsive-torque electrostatic actuator and its application to the micromirror vector display. The actuator consists of upper and lower rotation units and an output beam. Each unit has one row of rotation fingers, i.e., the lower and upper rotation fingers, which interdigitate with each other. The lower and upper rotation fingers are subject to different electric potentials. Each rotation finger and its underneath aligned fixed finger are subject to the same electric potential. The actuator generates repulsive torques to rotate the lower and upper fingers out-of-plane with the maximum rotation not limited either by the gap between fingers and the substrate nor by the pull-in effect. The output beam is connected to the lower row of rotation fingers, and therefore, the actuator has the same rotation as the lower unit. The actuator requires only two thin films and is suitable for surface micromachining. The model is established to verify the actuator and calculate its performance. Prototypes are fabricated and tested. The experimental results show that the actuator achieved a mechanical rotation of 11.5°at the static driving voltage of 150 V and a resonant frequency of 380 Hz with a sinusoidal driving voltage varying from 20 to 70 V. This paper demonstrates the application of the actuator in micromirror vector display. Four actuators are connected to the peripheries of a micromirror plate and independently controlled to drive the mirror plate to achieve quasi-static 2-D rotation. A laser beam is reflected and steered by the mirror plate to any desired direction to realize vector display. The prototype of the vector display micromirror is fabricated and tested. A vector display module integrating the micromirror, a laser, and a concave lens is built. Based on this module, an automotive head-up display system is developed, which is able to display the navigation map, speed, turning sign, and vehicle location on a translucent screen.[ 2015-0098]Index Terms-Two-row interdigitating-finger, repulsive-torque electrostatic actuator, surface micromachining, micromirror vector display, head-up display (HUD).

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Section: Electrostaticmentioning

confidence: 99%

A Two-Row Interdigitating-Finger Repulsive-Torque Electrostatic Actuator and Its Application to Micromirror Vector Display

Fan

2015

J. Microelectromech. Syst.

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“…In order to generate a more practical workspace in MEMS, the range of motion of the Z stage needs to be close to that of the X stage. For this purpose, the chosen Z stage utilizes a buckling [19]. The buckling is also called a wrinkling and commonly occurs in thin plate or long slender beams [28,29].…”

Section: The Z Stagementioning

confidence: 99%

Design of MEMS based three-axis motion stage by incorporating a nested structure

Kim¹,

Dagalakis²,

Gupta³

2014

J. Micromech. Microeng.

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A new design of three degrees-of-freedom (DOF) translational motion stage (XYZ stage) is presented in this paper. This XYZ stage is based on MEMS and designed by combining three existing one-DOF motion stages through a nested structure. By utilizing the previously developed stages, this approach can reduce the effort for the design and analysis steps and ensure reasonable reliability. For successful implementation, electrical connection to the engaged stages, electrical isolation among them, and additional floating frames are introduced for the chosen one-DOF motion stages. With these features, the presented XYZ stage is successfully fabricated and demonstrates the range of motion of 53.98, 49.15, and 22.91 µm along X, Y, and Z axes, respectively. The coupled motion errors among the engaged stages can be reduced to be less than 1 µm with the proposed compensation method.

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“…These characteristics make electrothermal micromirrors a suitable choice for biomedical imaging applications [ 11 , 12 , 13 , 14 ]. The electrothermal actuators may be designed using either a single thin-film metal structural layer to achieve an in-plane or out-of-plane deflection corresponding to an applied voltage [ 15 , 16 ] or a combination of two material layers (typically a metal and dielectric) bonded at an interface with a significant difference in their coefficients of thermal expansion (CTE) [ 17 , 18 , 19 ]. When an increase in temperature is applied, the thermal bi-layer actuator bends towards the side of the material that has a lower CTE value.…”

Section: Introductionmentioning

confidence: 99%

Multi-Response Optimization of Electrothermal Micromirror Using Desirability Function-Based Response Surface Methodology

et al. 2017

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The design of a micromirror for biomedical applications requires multiple output responses to be optimized, given a set of performance parameters and constraints. This paper presents the parametric design optimization of an electrothermally actuated micromirror for the deflection angle, input power, and micromirror temperature rise from the ambient for Optical Coherence Tomography (OCT) system. Initially, a screening design matrix based on the Design of Experiments (DOE) technique is developed and the corresponding output responses are obtained using coupled structural-thermal-electric Finite Element Modeling (FEM). The interaction between the significant design factors is analyzed by developing Response Surface Models (RSM) for the output responses. The output responses are optimized by combining the individual responses into a composite function using desirability function approach. A downhill simplex method, based on the heuristic search algorithm, is implemented on the RSM models to find the optimal levels of the design factors. The predicted values of output responses obtained using multi-response optimization are verified by the FEM simulations.

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Creating large out-of-plane displacement electrothermal motion stage by incorporating beams with step features

Cited by 20 publications

References 28 publications

A Two-Row Interdigitating-Finger Repulsive-Torque Electrostatic Actuator and Its Application to Micromirror Vector Display

A Two-Row Interdigitating-Finger Repulsive-Torque Electrostatic Actuator and Its Application to Micromirror Vector Display

Design of MEMS based three-axis motion stage by incorporating a nested structure

Multi-Response Optimization of Electrothermal Micromirror Using Desirability Function-Based Response Surface Methodology

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