Crosslinked PMMA as a Low-Dimensional Dielectric Sacrificial Layer for MEMS/NEMS and Quantum Nanostructures Fabrication

Teh, W. H.; Luo, Jiapeng; Liang, Chi‐Te; Smith, C. G.

doi:10.1007/0-387-25786-1_15

Cited by 2 publications

(2 citation statements)

References 74 publications

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“…Masks were made using Electron-Beam Lithography by overexposing the PMMA and causing the PMMA polymers to be cross-linked as described in2627. The Nb was etched with Reactive Ion Etching (RIE) using SF 6 .…”

Section: Methodsmentioning

confidence: 99%

Current-induced SQUID behavior of superconducting Nb nano-rings

Sharon

Shaulov

Berger

et al. 2016

Sci Rep

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The critical temperature in a superconducting ring changes periodically with the magnetic flux threading it, giving rise to the well-known Little-Parks magnetoresistance oscillations. Periodic changes of the critical current in a superconducting quantum interference device (SQUID), consisting of two Josephson junctions in a ring, lead to a different type of magnetoresistance oscillations utilized in detecting extremely small changes in magnetic fields. Here we demonstrate current-induced switching between Little-Parks and SQUID magnetoresistance oscillations in a superconducting nano-ring without Josephson junctions. Our measurements in Nb nano-rings show that as the bias current increases, the parabolic Little-Parks magnetoresistance oscillations become sinusoidal and eventually transform into oscillations typical of a SQUID. We associate this phenomenon with the flux-induced non-uniformity of the order parameter along a superconducting nano-ring, arising from the superconducting leads (‘arms’) attached to it. Current enhanced phase slip rates at the points with minimal order parameter create effective Josephson junctions in the ring, switching it into a SQUID.

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Section: Methodsmentioning

confidence: 99%

Current-induced SQUID behavior of superconducting Nb nano-rings

Sharon

Shaulov

Berger

et al. 2016

Sci Rep

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“…These technologies often require very expensive mechanical, chemical, or electrochemical instrumentation and will frequently damage delicate features or remove loosely attached microstructures from their substrate. To improve surface roughness, the use of complicated and expensive nanotechnology-based techniques to fabricate nanostructures varied in shape, type and dimension has been reported – . The nanotechnology-based studies were predominantly directed at flat surfaces and usually cannot be transferred to miniaturized 3D features without challenges.…”

Section: Introductionmentioning

confidence: 99%

In situ Roughening of Polymeric Microstructures

Shadpour

Allbritton

2010

ACS Appl. Mater. Interfaces

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A method to perform in-situ roughening of arrays of microstructures weakly adherent to an underlying substrate was presented. SU8, 1002F, and polydimethylsiloxane (PDMS) microstructures were roughened by polishing with a particle slurry. The roughness and the percentage of dislodged or damaged microstructures was evaluated as a function of the roughening time for both SU8 and 1002F structures. A maximal RMS roughness of 7-18 nm for the surfaces was obtained within 15 to 30 s of polishing with the slurry. This represented a 4-9 fold increase in surface roughness relative to that of the native surface. Less than 0.8% of the microstructures on the array were removed or damage after 5 min of polishing. Native and roughened arrays were assessed for their ability to support fibronectin adhesion and cell attachment and growth. The quantity of adherent fibronectin was increased on roughened arrays by two-fold over that on native arrays. Cell adhesion to the roughened surfaces was also increased compared to native surfaces. Surface roughening with the particle slurry also improved the ability to stamp molecules onto the substrate during microcontact printing. Roughening both the PDMS stamp and substrate resulted in up to a 20-fold improvement in the transfer of BSA-Alexa Fluor 647 from the stamp to the substrate. Thus roughening of micronscale surfaces with a particle slurry increased the adhesion of biomolecules as well as cells to microstructures with little to no damage to large scale arrays of the structures.

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Crosslinked PMMA as a Low-Dimensional Dielectric Sacrificial Layer for MEMS/NEMS and Quantum Nanostructures Fabrication

Cited by 2 publications

References 74 publications

Current-induced SQUID behavior of superconducting Nb nano-rings

Current-induced SQUID behavior of superconducting Nb nano-rings

In situ Roughening of Polymeric Microstructures

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