Crosstalk reduction with a micromachined diaphragm structure for integrated ultrasound transducer arrays

Mo, J.-H.; Fowlkes, J. Brian; Robinson, Andrew; Carson, Paul L.

doi:10.1109/58.166810

Cited by 34 publications

(8 citation statements)

References 4 publications

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“…Increasing the element density is crucial to realize 2-D pMUT arrays for practical 3-D medical imaging. Moreover, the crosstalk between different elements of the array should be controlled while reducing the interspace [20]. …”

Section: Introductionmentioning

confidence: 99%

An Ultra-High Element Density pMUT Array with Low Crosstalk for 3-D Medical Imaging

Yang

Tian

Wang

et al. 2013

Sensors

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A ∼1 MHz piezoelectric micromachined ultrasonic transducer (pMUT) array with ultra-high element density and low crosstalk is proposed for the first time. This novel pMUT array is based on a nano-layer spin-coating lead zirconium titanium film technique and can be fabricated with high element density using a relatively simple process. Accordingly, key fabrication processes such as thick piezoelectric film deposition, low-stress Si-SOI bonding and bulk silicon removal have been successfully developed. The novel fine-pitch 6 × 6 pMUT arrays can all work at the desired frequency (∼1 MHz) with good uniformity, high performance and potential IC integration compatibility. The minimum interspace is ∼20 μm, the smallest that has ever been achieved to the best of our knowledge. These arrays can be potentially used to steer ultrasound beams and implement high quality 3-D medical imaging applications.

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Section: Introductionmentioning

confidence: 99%

An Ultra-High Element Density pMUT Array with Low Crosstalk for 3-D Medical Imaging

Yang

Tian

Wang

et al. 2013

Sensors

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“…As is the case for conventional ultrasound transducers, the piezoelectric material most widely used in PMUTs is PZT, a ferroelectric material first formulated in the 1950s by Jaffe [ 56 ]. Although other materials (e.g., PVDF [ 57 , 58 ], AlN [ 59 , 60 ] and ZnO [ 27 , 61 , 62 , 63 , 64 ]) have been relatively commonly reported in PMUTs, especially in early devices, these usually have a weaker piezoelectric response than ferroelectric oxide films (including PZNT [ 34 , 65 ]). PZT-based compositions are therefore better for low voltage actuation and high sensitivity sensing [ 42 , 66 ].…”

Section: Piezoelectric Materials For Pmutsmentioning

confidence: 99%

Piezoelectric Micromachined Ultrasound Transducer (PMUT) Arrays for Integrated Sensing, Actuation and Imaging

Qiu

Gigliotti

Wallace

et al. 2015

Sensors

306

198

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Many applications of ultrasound for sensing, actuation and imaging require miniaturized and low power transducers and transducer arrays integrated with electronic systems. Piezoelectric micromachined ultrasound transducers (PMUTs), diaphragm-like thin film flexural transducers typically formed on silicon substrates, are a potential solution for integrated transducer arrays. This paper presents an overview of the current development status of PMUTs and a discussion of their suitability for miniaturized and integrated devices. The thin film piezoelectric materials required to functionalize these devices are discussed, followed by the microfabrication techniques used to create PMUT elements and the constraints the fabrication imposes on device design. Approaches for electrical interconnection and integration with on-chip electronics are discussed. Electrical and acoustic measurements from fabricated PMUT arrays with up to 320 diaphragm elements are presented. The PMUTs are shown to be broadband devices with an operating frequency which is tunable by tailoring the lateral dimensions of the flexural membrane or the thicknesses of the constituent layers. Finally, the outlook for future development of PMUT technology and the potential applications made feasible by integrated PMUT devices are discussed.

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“…The problems of it are that the frequency bandwidth of most piezoelectric ceramics is narrow, and that it is difficult to assemble such transducers into a fine-scale phase array with no crosstalk [13,14]. An alternative strategy is a device of micromachined electrostatic diaphragms [15,16].…”

Section: Comparison With Other Devicesmentioning

confidence: 99%

Ultrasonic Emission from Nanocrystalline Porous Silicon

Shinoda

Koshida

2009

Nanostructure Science and Technology

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A simple layer structure composed of a metal thin film and a porous silicon layer on a silicon substrate generates intense and wide-band airborne ultrasounds. The large-bandwidth and the fidelity of the sound reproduction are leveraged in applications varying from sound-based measurement to a scientific study of animal ecology. This chapter describes the basic principle of the ultrasound generation. The macroscopic properties of the low thermal conductivity and the small heat capacity of nanocrystalline porous silicon thermally induce ultrasonic emission. The state-of-the-art of the achievable sound pressure and sound signal properties is introduced, with the technological and scientific applications of the devices.

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Crosstalk reduction with a micromachined diaphragm structure for integrated ultrasound transducer arrays

Cited by 34 publications

References 4 publications

An Ultra-High Element Density pMUT Array with Low Crosstalk for 3-D Medical Imaging

An Ultra-High Element Density pMUT Array with Low Crosstalk for 3-D Medical Imaging

Piezoelectric Micromachined Ultrasound Transducer (PMUT) Arrays for Integrated Sensing, Actuation and Imaging

Ultrasonic Emission from Nanocrystalline Porous Silicon

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