Cryogenic liquid-jet target for debris-free laser-plasma soft x-ray generation

Berglund, Magnus; Rymell, L.; Hertz, Hans M.; Wilhein, Thomas

doi:10.1063/1.1148944

Cited by 90 publications

(35 citation statements)

References 15 publications

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“…Using a nozzle with piezoelectric aperture, a hydrodynamic instability is imprinted onto the water jet. Thus, a determined series of micrometersized water droplets is created in a certain distance from the nozzle [39,40]. Their diameter under experimental conditions is determined to be 15 μm.…”

Section: Methodsmentioning

confidence: 99%

High-order-harmonic generation from dense water microdroplets

et al. 2013

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We report on high-order-harmonic generation from micrometer-sized liquid water droplets. In pump-probe experiments, the influence of the time delay onto the emission of harmonic radiation is systematically studied. Phase-matching aspects are observed by controlling the focal position and the intensity of the probe pulse. The spatiotemporal dynamics of the droplet during interaction with intense laser pulses are studied by controlling the intensity of the pump pulse. We find transient phase-matching conditions and the expansion dynamics of the droplet to be of major influence on the harmonic yield.

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Section: Methodsmentioning

confidence: 99%

High-order-harmonic generation from dense water microdroplets

et al. 2013

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“…[1][2][3][4][5][6] To estimate exposure times for a particular experiment, the absolute spectral emission of the x-ray source must be determined. Additionally, in order to guarantee stable source operation, real-time control of the plasma parameters is needed.…”

Section: Introductionmentioning

confidence: 99%

A slit grating spectrograph for quantitative soft x-ray spectroscopy

Wilhein

Rehbein

Hambach

et al. 1999

Review of Scientific Instruments

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In this article we describe a new slit grating spectrograph which is based on an e-beam written 10 000 linepairs/mm freestanding transmission diffraction grating. In combination with a thinned, back-illuminated charge coupled device (CCD), the spectrograph allows for real-time spectroscopy of laser-produced plasma x-ray sources within the wavelength region λ=1–20 nm. Calibration of grating and CCD allow for the possibility to measure absolute photon fluxes, currently within the wavelength region λ=1–6 nm. The compact spectrograph is easy to align and flexible in its use. Absolutely calibrated spectra were obtained from a liquid-jet laser-plasma source in the water window, with a spectral resolution λ/Δλ⩾330 at λ=3.37 nm. A simple change in experimental geometry allowed single-shot spectra to be recorded with λ/Δλ⩾60 at the same wavelength. In addition, spectra from this laser-plasma source were measured within the range λ=9–20 nm.

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“…Furthermore, it reduces debris production several orders of magnitude compared to conventional targets 6 and for certain liquids the debris deposition is practically eliminated. 3,5 Thus, the effective photon flux may be increased a few orders of magnitude compared to conventional targets since collection optics may be used reasonably close to the plasma. By choosing a suitable target liquid and correct plasma conditions, the emission wavelength may be spectrally tailored to suit different applications, e.g., the extreme ultraviolet ͑EUV͒ ͑ϳ0.1 keV, e.g., EUV lithography͒, 7-9 soft x rays ͑ϳ1 keV, e.g., microscopy and reflectometry͒, 2,3,5,10 and hard x rays ͑ϳ10 keV, e.g., diffraction͒.…”

Section: Introductionmentioning

confidence: 99%

Target optimization of a water-window liquid-jet laser–plasma source

Groot

Hemberg

Holmberg

et al. 2003

Journal of Applied Physics

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We optimize the water-window x-ray flux and debris deposition for a liquid-jet laser plasma source by varying both the target diameter and the jet material. For two target liquids, methanol and ethanol, measurements of the λ=3.37 nm C VI x-ray flux and the debris deposition rates are presented as function of the jet diameter. It is shown that the effective carbon debris deposition is more than 1 order of magnitude smaller for methanol, while the x-ray flux is reduced only ∼40%. The reduction in carbon debris deposition may be explained by reactive ion etching by oxygen from the plasma. Thus, the methanol water-window source may be operated at a 5–10× higher flux without increasing the debris deposition. The optimization potentially allows a reduction of the exposure time of compact soft x-ray microscopy or other water-window applications based on such sources without increasing damage to sensitive x-ray optics.

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Cryogenic liquid-jet target for debris-free laser-plasma soft x-ray generation

Cited by 90 publications

References 15 publications

High-order-harmonic generation from dense water microdroplets

High-order-harmonic generation from dense water microdroplets

A slit grating spectrograph for quantitative soft x-ray spectroscopy

Target optimization of a water-window liquid-jet laser–plasma source

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