Decomposition of silicon tetrachloride by microwave plasma jet at atmospheric pressure

Wu, Lifeng; Ma, Zhibin; He, Anbang; Wang, Jianhua

doi:10.1134/s0020168509120188

Cited by 8 publications

(2 citation statements)

References 9 publications

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“…However, the samples obtained were powdered silicon, making it difficult to obtain high-purity ingots. In [18,19], a microwave discharge in a mixture of SiCl 4 with H 2 and Ar at a pressure of 26 to 40 kPa was used to obtain SiHCl 3 . In [20,21], TCS was obtained in an arc, and in [22], in a high-frequency (13.56 MHz) plasmatron.…”

Section: Introductionmentioning

confidence: 99%

Plasma-Chemical Disposal of Silicon and Germanium Tetrachlorides Waste by Hydrogen Reduction

Kornev,

Gornushkin,

Shabarova

et al. 2023

Sci

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The processes of hydrogen reduction of silicon and germanium chlorides under the conditions of high-frequency (40.68 MHz) counteracted arc discharge stabilized between two rod electrodes are investigated. The main gas-phase and solid products of plasma-chemical transformations are determined. Thermodynamic analysis of SiCl4 + H2 and GeCl4 + H2 systems for optimal process parameters was carried out. Using the example of hydrogen reduction of SiCl4 by the method of numerical modeling, gas-dynamic and thermal processes for this type of discharge are investigated. The impurity composition of gas-phase and solid reaction products is investigated. The possibility of single-stage production of high-purity Si and Ge mainly in the form of compact ingots, as well as high-purity chlorosilanes and trichlorogermane, is shown.

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Section: Introductionmentioning

confidence: 99%

Plasma-Chemical Disposal of Silicon and Germanium Tetrachlorides Waste by Hydrogen Reduction

Kornev,

Gornushkin,

Shabarova

et al. 2023

Sci

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“…Plasma methods proved promising for this purpose [2][3][4][5]. Use of microwave discharge in these methods ensures effi cient energy transfer to chemically active plasma and a high silicon tetrachloride conversion [6].…”

Section: Introductionmentioning

confidence: 99%

Silicon tetrachloride conversion in microwave discharge hydrogen plasma

Корнев

Шапошников

Gusev

2015

Theor Found Chem Eng

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Silicon tetrachloride conversion in microwave discharge hydrogen plasma has been experimen tally investigated. The main products of this process are silicon, hexachlorodisilane, and polychlorosilanes. The proportions of the products depend on specific energy input and on the place in which the reactants (SiCl 4 and H 2 ) are introduced into the plasma discharge zone. The conditions ensuring a 90% silicon yield have been determined. The gas dynamic and heat transfer processes in a cylindrical reactor have been numer ically simulated for these conditions. The temperature interval in the discharge zone (2000-2500 K) and the rate of quenching of products (silicon containing radicals) have been estimated. Experimental data of this study and their comparison with data available from the literature suggest a hypothesis concerning the reac tions responsible for the formation of silicon, hexachlorodisilane, and polychlorosilanes.

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Silicon Nanoparticles and Microparticles

Shen

2016

Methods in Pharmacology and Toxicology

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Decomposition of silicon tetrachloride by microwave plasma jet at atmospheric pressure

Cited by 8 publications

References 9 publications

Plasma-Chemical Disposal of Silicon and Germanium Tetrachlorides Waste by Hydrogen Reduction

Plasma-Chemical Disposal of Silicon and Germanium Tetrachlorides Waste by Hydrogen Reduction

Silicon tetrachloride conversion in microwave discharge hydrogen plasma

Silicon Nanoparticles and Microparticles

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