Deep microstructuring in glass for microfluidic applications

Malek, Chantal Khan; Robert, Laurent; Boy, J.J.; Blind, P.

doi:10.1007/s00542-006-0185-0

Cited by 26 publications

(13 citation statements)

References 29 publications

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“…These microfluidic devices were traditionally manufactured using silicon and glass (Malek et al 2007), but had gained increasing popularity in using polymers because of lower material cost and simpler fabrication processes.…”

Section: Introductionmentioning

confidence: 99%

Fabrication of microfluidic channel utilizing silicone rubber with vacuum casting

et al. 2008

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Microfluidic patterns of 100 lm in width and 50 lm height were replicated from a master using vacuum casting with silicone rubber. These silicone copies are subjected to thorough analysis for dimensional accuracy against the master pattern. Analysis of experimental results shows repeatability of the silicone rubber molds. To test the limits of vacuum casting with silicone rubber, an attempt was undertaken to replicate 8 lm microchannel and submicron features. The results show that casting of microfluidic channel via vacuum casting has high repeatability.

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Section: Introductionmentioning

confidence: 99%

Fabrication of microfluidic channel utilizing silicone rubber with vacuum casting

et al. 2008

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“…The demand for fabricated glass has been increasingly rising to generate diversified functionalities on optical devices, micro-molds and micro-fluidics devices due to their attractive features like high strength, wear resistance, and good chemical stability [1,2].…”

Section: Introductionmentioning

confidence: 99%

“…Hence, it would be a better idea to produce these glass micro-features by mechanical processes [2]. Literature review shows that many researchers have studied glass machining process which involves single-point diamond turning tool [3,4], conventional grinding wheel [5][6][7][8][9][10][11][12], and milling cutter [13][14][15].…”

Section: Introductionmentioning

confidence: 99%

Fabrication of different geometry cutting tools and their effect on the vertical micro-grinding of BK7 glass

Perveen

San

Rahman

2011

Int J Adv Manuf Technol

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With the demand for microstructures of not only with diversified shape but also of reduced dimension on glass, fabrication of polycrystalline diamond (PCD) tool/ microelectrodes with different shape has become important. However, to date, fabrication of different shapes in single setup is not possible and also needs special indexing attachment. To solve this problem, in this study, a specially designed block containing three v-slots of 60°, 90°, and 120°has been designed and fabricated using wire cut. Thereafter with the help of block electro-discharge machining method and using this specially designed block, different shapes of microelectrodes with symmetrical and non-symmetrical section has been fabricated. This study also investigates the feasibility of using these different geometry PCD tool for micro-grinding of BK7 glass. In this context, a relative study on the micro-grinding performance of four different geometry tools (circular, D-shaped, triangular, and square) has been carried out. It has been observed that among the different shaped tools, D-shaped tool experienced lowest cutting force along x-and y-axes where as triangular tool faced lowest force along z-axis, and highest cutting forces were found to be experienced by square tool. Average and maximum roughness of machined surface was found to be improved from circular to others tool except triangular one. But, it was also observed that side surface started to deteriorate from circular to other tool due to edge wear. In case of tool wear, square and triangular tool experienced more wear than circular and D-shaped tool due to their frequent edge blunting or rounding effect. Finally, among four different geometry tools, D-shaped tool was considered to provide better performance in terms of the achieved surface finish, tool wear, and cutting force analysis.

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“…These requirements are challenging with respect to the physical and chemical properties, especially in lab-on-a-chip devices for long-term cell monitoring or for micro-reaction techniques in Micro Total Analysis Systems (μTAS) [3]. Unfortunately, glass, as the material of choice, requires special adaptations in the production methods [4]. For low volume production or prototyping, photolithography techniques are time-consuming and costly due to their high number of processing steps.…”

Section: Introductionmentioning

confidence: 99%

“…In some cases, laser techniques were used by other authors for the production of channels or recesses in microfluidic systems [4,[14][15][16].…”

Section: Introductionmentioning

confidence: 99%

Fast Prototyping of Sensorized Cell Culture Chips and Microfluidic Systems with Ultrashort Laser Pulses

Bonk

Oldorf²,

Peters³

et al. 2015

Micromachines

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Abstract:We developed a confined microfluidic cell culture system with a bottom plate made of a microscopic slide with planar platinum sensors for the measurement of acidification, oxygen consumption, and cell adhesion. The slides were commercial slides with indium tin oxide (ITO) plating or were prepared from platinum sputtering (100 nm) onto a 10-nm titanium adhesion layer. Direct processing of the sensor structures (approximately three minutes per chip) by an ultrashort pulse laser facilitated the production of the prototypes. pH-sensitive areas were produced by the sputtering of 60-nm Si3N4 through a simple mask made from a circuit board material. The system body and polydimethylsiloxane (PDMS) molding forms for the microfluidic structures were manufactured by micromilling using a printed circuit board (PCB) milling machine for circuit boards. The microfluidic structure was finally imprinted in PDMS. Our approach avoided the use of photolithographic techniques and enabled fast and cost-efficient prototyping of the systems. Alternatively, the direct production of metallic, ceramic or polymeric molding tools was tested. The use of ultrashort pulse lasers improved the precision of the structures and avoided any contact of the final structures with toxic chemicals and possible adverse effects for the cell culture in lab-on-a-chip systems.

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Deep microstructuring in glass for microfluidic applications

Cited by 26 publications

References 29 publications

Fabrication of microfluidic channel utilizing silicone rubber with vacuum casting

Fabrication of microfluidic channel utilizing silicone rubber with vacuum casting

Fabrication of different geometry cutting tools and their effect on the vertical micro-grinding of BK7 glass

Fast Prototyping of Sensorized Cell Culture Chips and Microfluidic Systems with Ultrashort Laser Pulses

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