“…For this reason, investigations of the light induced defect creation as well as native defects in the alloy as a function of Ge content has become an important issue to be understood and resolved both scientifically and technologically. As compared to the research undertaken during the last three decades on the SWE seen in pure a-Si:H [17], only a small number of studies have been reported for the native and light induced defects in a-SiGe:H alloys [8][9][10][11][12][13][14][15][16]. Fundamental investigations of these defects have been carried out using electron spin resonance (ESR) [4,5,10], steady-state photoconductivity (SSPC) [8,12,18], modulated photoconductivity (MPC) [19,20], drive level capacitance profiling (DLCP) [21], and sub-bandgap absorption methods [3,8,18,[21][22][23][24].…”