2015
DOI: 10.1088/0256-307x/32/8/088101
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Defect Reduction in GaAs/Si Films with the a-Si Buffer Layer Grown by Metalorganic Chemical Vapor Deposition

Abstract: The growth of GaAs epilayers on silicon substrates with a thin amorphous silicon (a-Si) buffer layer by metalorganic chemical vapor deposition is investigated in detail. Combining with the two-step growth method, the growth conditions of the a-Si buffer layer are optimized for growth of high-quality GaAs/Si epilayers. The a-Si buffer layer exhibits the best effect with thickness of 1.8 nm and growth temperature of 620 ∘ C. It is found that the introduction of this a-Si layer on Si substrates effectively reduce… Show more

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Cited by 6 publications
(3 citation statements)
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“…In the past 40 years, various methods have been proposed for TD bending, such as thermal cyclic annealing, patterning substrates, and using strained-layer superlattices (SLS) and QDs. [8][9][10][11][12][13][14] Compared with SLS, QDs have strong stress field as three-dimensional stress structures. A very strong Peach-Koehlor force will bend the dislocation energetically when a TD propagates close to a QD.…”
Section: Introductionmentioning
confidence: 99%
“…In the past 40 years, various methods have been proposed for TD bending, such as thermal cyclic annealing, patterning substrates, and using strained-layer superlattices (SLS) and QDs. [8][9][10][11][12][13][14] Compared with SLS, QDs have strong stress field as three-dimensional stress structures. A very strong Peach-Koehlor force will bend the dislocation energetically when a TD propagates close to a QD.…”
Section: Introductionmentioning
confidence: 99%
“…The lasers have a low threshold of 1.6 mW at 4.5 K under continuouswave optical pumping. In addition, amorphous Si buffer layer, strain-compensated InGaAsP superlattices, exact-oriented GaP/Si (0 0 1) substrates, and selective area growth (SAG) are also used to reduce dislocations [9][10][11][12][13].…”
Section: Introductionmentioning
confidence: 99%
“…[4−6] Two-dimensional materials can be fabricated by several methods, for instance, mechanical exfoliation, surface growth, [7] solution-phase growth, and vapor growth. [8,9] Lots of discoveries of intriguing physical properties of 2D materials have been made in optics, [10] mechanics, [11] thermology, [12] topology, [13] magnetics [14,15] and electronics. [16] Diverse properties further lead to enormous applications.…”
mentioning
confidence: 99%