2003
DOI: 10.1016/s0026-2714(03)00271-3
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Degradation in polysilicon thin film transistors related to the quality of the polysilicon material

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“…The several variations of the SLS technique allow the manufacturing of polysilicon films with excellent intragrain quality and grains of different geometry. The performance and reliability of the devices fabricated on SLS polysilicon depend on this specific microstructure of the polysilicon film [7].…”
Section: Introductionmentioning
confidence: 99%
“…The several variations of the SLS technique allow the manufacturing of polysilicon films with excellent intragrain quality and grains of different geometry. The performance and reliability of the devices fabricated on SLS polysilicon depend on this specific microstructure of the polysilicon film [7].…”
Section: Introductionmentioning
confidence: 99%
“…The several variations of the SLS technique allow the manufacturing of polysilicon films with excellent intragrain quality and grains of different geometry. The performance and reliability of the devices fabricated on SLS polysilicon depend on this specific microstructure of the polysilicon film [7] but also on other fabrication-related factors, such as the quality of the gate dielectric.…”
mentioning
confidence: 99%