Degradation of Poly(acrylic acid) in Aqueous Solution by Using O&lt;sub&gt;3&lt;/sub&gt; Microbubble

Miyazaki, Terumi; Nishiyama, Takashi; Sato, Eriko; Horibe, Hideo

doi:10.2494/photopolymer.31.409

Cited by 6 publications

(5 citation statements)

References 21 publications

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“…•− would chemically react with polycarboxylic-acid-type polymerdispersant coated on the crystalline ZrO 2 -abrasives, rapidly degrading the degree of the ZrO 2 abrasive stability in a W-film CMP slurry. [13][14][15] Thus, we measured the secondary size of ZrO 2 abrasives after Fenton reaction as a function of a scavenger (i.e., TCT-Li) concentration, as shown in Fig. 1a.…”

Section: Resultsmentioning

confidence: 99%

Influence of Scavenger on Abrasive Stability Enhancement and Chemical and Mechanical Properties for Tungsten-Film Chemical- Mechanical-Planarization

Seo

Bae

Kim

et al. 2020

ECS J. Solid State Sci. Technol.

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In tungsten(W)-film chemical-mechanical-planarization(CMP), Fenton reaction between ferric-based-catalyst and oxidant hydrogen peroxide (H2O2) enhances the chemical-oxidation degree of the W-film surface and degrades the abrasive stability of a W-film CMP-slurry as a trade-off effect. The addition of a scavenger (i.e., trilithium citrate tetrahydrate: TCT–Li) in the W-film CMP-slurry improved significantly the abrasive stability. A ionized scavenger (i.e., citrate ions) produced a Fe(III)-citrate complex and chemically reacted with the reactive radicals (i.e., OH·, HO2· and O2·−), depressing Fenton reaction in a ferric-catalyst-based W-film CMP-slurry. Hence, the abrasive stability of the W-film CMP-slurry was improved with the scavenger concentration. In addition, TCT–Li influenced mainly the chemical properties such as the chemical-oxidation degree for the W-film surface and the hydrolysis degree of the SiO2-film surface. Thus, the W-film polishing-rate slightly decreased with the scavenger concentration while the SiO2-film peaked at a specific scavenger concentration (i.e., 0.1-wt%). In addition, two chemical reaction regions were found; i.e., the scavenger-concentration dominant chemical-reaction at the region I (i.e., TCT–Li 0 ∼ 0.1 wt%) and the catalyst [i.e., Fe(NO3)3]-concentration dominant chemical-reaction at the region II (i.e., TCT–Li 0.1 ∼ 0.3 wt%). The region I showed more strongly a chemical-dominant-reaction than the region II, determining the W- and SiO2-film polishing-rate.

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Section: Resultsmentioning

confidence: 99%

Influence of Scavenger on Abrasive Stability Enhancement and Chemical and Mechanical Properties for Tungsten-Film Chemical- Mechanical-Planarization

Seo

Bae

Kim

et al. 2020

ECS J. Solid State Sci. Technol.

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“…In this study, the aromatic compounds methylene blue and salicylic acid were decomposed with oxygen MBs to confirm the effect of MBs [14][15][16][17].…”

Section: Introductionmentioning

confidence: 92%

Clarification of Degradation of Aromatic Compounds by Oxygen Microbubbles Water

Mizutani,

Horibe

2023

J. Photopol. Sci. Technol.

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Microbubbles (MBs) are tiny bubbles with a particle size of 1 -100 μm. It has been reported that MBs have excellent gas dissolving ability, and hydroxyl radicals are generated when microbubbles collapse in water. Therefore, we aimed to decompose persistent organic compounds using hydroxyl radicals generated by MBs collapse. In this study, we evaluated the degradation of the aromatic compounds methylene blue and salicylic acid by oxygen MBs water. Methylene blue was used as a hydroxyl radical detector, and we investigated the conditions under which hydroxyl radicals were generated most frequently. We confirmed that hydroxyl radicals were generated most frequently when oxygen MBs water generated by the gas-liquid revolving system was circulated under acidic conditions. The presence of cations such as copper and hydrogen ions affects the stability of MBs, and the shear stress caused by the swirling liquid flow is thought to promote MB crushing. Treatment of salicylic acid under these conditions reduced the Total Organic Carbon (TOC) of salicylic acid by about 40%. In addition ,From the intermediate products, we confirmed that salicylic acid and hydroxyl radicals undergo substitution reactions according to the orientation of the functional group.

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“…The details of MBs generation system have been described elsewhere. [24][25][26][27][28] Pressure for MBs generation was set to 5 MPa. When investigating the effect of MBs, MBs was first generated in pure water to avoid the vaporization of phenol during the preparation process of MBs.…”

Section: Decomposition Of 4-chlorophenol and Phenol By Underwater Pul...mentioning

confidence: 99%

Enhanced decomposition of toxic pollutants by underwater pulsed discharge in the presence of hydrogen peroxide and microbubbles

Matsuura

Kometani

Horibe

et al. 2021

Jpn. J. Appl. Phys.

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The decomposition of phenol and 4-chlorophenol by underwater pulsed discharge has been examined. The addition of hydrogen peroxide improved the decomposition rate of phenol by about 2.5 times and that of 4-chlorophenol by about 1.5 times. Analysis using a fluorescent probe suggested that the addition of hydrogen peroxide enhanced the production of hydroxyl radicals by about 3 times. We have also examined the effect of using microbubbles on the decomposition of phenol. The use of only microbubbles resulted in a slight increase of the decomposition rate, while the use of both microbubbles and hydrogen peroxide led to a remarkable enhancement of the decomposition rate by about 3.5 times with the conversion of phenol reaching 70% at discharge time of 3 h, which corresponded to the energy yield of 4.39 × 10–9 mol J−1.

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Degradation of Poly(acrylic acid) in Aqueous Solution by Using O<sub>3</sub> Microbubble

Cited by 6 publications

References 21 publications

Influence of Scavenger on Abrasive Stability Enhancement and Chemical and Mechanical Properties for Tungsten-Film Chemical- Mechanical-Planarization

Influence of Scavenger on Abrasive Stability Enhancement and Chemical and Mechanical Properties for Tungsten-Film Chemical- Mechanical-Planarization

Clarification of Degradation of Aromatic Compounds by Oxygen Microbubbles Water

Enhanced decomposition of toxic pollutants by underwater pulsed discharge in the presence of hydrogen peroxide and microbubbles

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