Delayed onset of return flow by substrate inclination in model horizontal longitudinal MOCVD processes

Computation of three-dimensional flow and thermal fields in a model horizontal chemical vapor deposition reactor

“…5 and 6 indicates that the buoyancy-to-inertia ratio plays an important role in retarding the formation of longitudinal rolls. Nonetheless, the transverse and longitudinal rolls induced by the heated circular disk are 3-D, which are consistent with the experimental observation performed at the relatively lower buoyancy-to-inertia ratio conditions [4,5].…”

“…The mixed convective heat and mass transfer in simulated horizontal chemical vapor deposition (CVD) reactors have been the subject of many experimental [1][2][3][4][5], theoretical [6][7][8] and numerical [9][10][11][12][13][14][15][16][17] investigations because their transport phenomena affect the characteristics of CVD processes. In the mixed convective flow through a horizontal duct with a differentially heated lower wall, the transverse and longitudinal flow recirculations may co-exist.…”

Study on the optimization of the deposition rate of planetary GaN-MOCVD films based on CFD simulation and the corresponding surface model

“…Fortunately, computational fluid dynamics (CFD) is highly useful for the development of MOCVD equipment. Dimitrios et al, in an early study of the cavity flow state [17][18][19], investigated the particle flow of TiO in a vertical spray reaction chamber, and using the fluid model calculation results and particles in the reaction chamber of the control flow graph experiment, obtained the flow state to determine the feasibility of the numerical simulation. In addition, Theodoropoulos and others investigated the chemical mechanism model [20,21] to study the reaction chamber and coupled field, and proposed a model for the influence of different process parameters on the deposition rate under different conditions.…”

Numerical investigations of geometric effects on flow and thermal fields in a horizontal CVD reactor

“…They found that a regime transition from longitudinal rolls to transverse rolls occurred at Gr/Re 2 ¼ 6000, while the critical Rayleigh (Ra) number was to be dependent on the flow. The effects of substrate inclination on the buoyancy-induced return flow structure in a horizontal rectangular duct with a heated disk were experimentally investigated by Kuo et al [22] for Re ranging from 3.7 to 79.7, Ra from 9040 to 2.4 Â 10 4 , and tilted angle at 01, 0.341, and 0.971. The results showed a substantial delay in the onset of the return flow and the effective suppression of the unstable vortex flow by the bottom plate inclination.…”