2013 IEEE International Electron Devices Meeting 2013
DOI: 10.1109/iedm.2013.6724560
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Demonstration of improved transient response of inverters with steep slope strained Si NW TFETs by reduction of TAT with pulsed I-V and NW scaling

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Cited by 56 publications
(36 citation statements)
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“…1). Knoll et al [4] demonstrated the first strained Si nanowire inverter showing sharp transition at 0.2 V. Considering the low tunneling current of Si TFETs, III-V semiconductor materials offer more freedom of engineering the tunnel junctions and improving the tunneling current [5]. Dewey et al in [6] first explored InGaAs homojunction and heterojunction TFET (HTFET) with improved on-current than Si TFET.…”
Section: A Tunnel Fet Device Designmentioning
confidence: 97%
“…1). Knoll et al [4] demonstrated the first strained Si nanowire inverter showing sharp transition at 0.2 V. Considering the low tunneling current of Si TFETs, III-V semiconductor materials offer more freedom of engineering the tunnel junctions and improving the tunneling current [5]. Dewey et al in [6] first explored InGaAs homojunction and heterojunction TFET (HTFET) with improved on-current than Si TFET.…”
Section: A Tunnel Fet Device Designmentioning
confidence: 97%
“…In contrast to the heavy As + in the first device generation the P + ion implantation created less crystal defects and more P atoms are activated at low temperature and by that improve the tunneling junction quality. Further details on the TFET fabrication process are described in [14]. Fig.…”
Section: Device Fabricationmentioning
confidence: 99%
“…The epitaxial NiSi 2 layers were formed using very thin Ni layers at source/drain. Steep n + -i-source and p + -i junctions with 1.4 nm/dec and 3.5 nm/dec were realized by tilted implantation of As + -ions and B + -ions, respectively followed by low temperature annealing to segregate dopants at the NiSi 2 /channel interfaces [14].…”
Section: Device Fabricationmentioning
confidence: 99%
“…However, the low current drivability has been pointed as the major weakness of TFET. To improve the performance of TFET (e.g., the decrease of SS and increase of I ON =I OFF ratio), extensive research has been performed using various approaches, including the modification of the device structure, [3][4][5][6][7][8] introduction of new materials, [9][10][11][12] and optimization of the fabrication technology. [13][14][15][16][17] Studies have also investigated many of the TFET-based circuit designs.…”
Section: Introductionmentioning
confidence: 99%