“…Modifications in DLC thin films by ion irradiation has been previously studied for changes in the properties [9,10]. Recently H. Tani et al [7] have reported that two step Ar-N2 GCIB irradiation has resulted in the reduction of surface roughness in DLC films. In this context it will be interesting to study the influence high energy ion irradiation on surface roughness of DLC films synthesized by microwave plasma CVD.…”