Electrostatic spray deposition (ESD) was applied to fabricate a thin-layer ( e 3 lm thickness) yttria-stabilized zirconia (YSZ) electrolyte on a solid oxide fuel cell (SOFC) anode substrate consisting of nickel-YSZ cermet. Reducing the thickness of a state-of-the-art electrolyte, and thereby reducing the cell internal IR drop, is a promising strategy to make the intermediate temperature SOFC (ITSOFC) operating at 600-800°C possible. About 8 mol% YSZ colloidal solution in ethanol was sprayed onto the substrate anode surface at 250-300°C by ESD. After sintering the deposited layer at 1250-1400°C for 1-6 h, the cathode layer, consisting of lanthanum strontium manganate (LSM), was sprayed or brush coated onto the electrolyte layer. Performance tests on the cell were carried out at 800°C to evaluate the electrolyte layer formed by ESD. With a 97% H 2 /3% H 2 O mixture and air as fuel and oxidant gas, respectively, open circuit voltage (OCV) was found to be close to the theoretical value.