Deposition of silver films by plasma-enhanced chemical vapour deposition

Plasma‐enhanced deposition of silver nanoparticles onto polymer and metal surfaces for the generation of antimicrobial characteristics

“…The reactor is composed of Pyrex-glass cylindrical walls (13) and two disc-shaped stainless steel electrodes (11 and 16). The upper electrode is connected to the monomer-feeding installation (2 and 3), vacuum system (4 and 5), and pressure gauge (10) and also includes a perforated, disc-shaped gas/vapor distribution stainless steel plate and a gas/ vapor flow-out-guiding glass tube (14). The lower electrode serves also as the substrate holder and is connected to the RF-power supply; the upper electrode is grounded.…”

“…The only published study describing deposition of silver from an organometallic derivative under cold plasma conditions was based on the use of perfluoro-1-methylpropenylsilver as a precursor. 10 However, both the stability and the volatility of this compound are not adequate for practical applications; in addition the compound is very expensive. In this contribution the deposition of silver nanoparticles under formaldehyde-radio frequency (RF)-plasma conditions onto polydimethylsiloxane (medical-and food-grade silicone rubber), paper, and stainless steel surfaces is presented, and the antimicrobial characteristics of the silver-coated substrates are discussed.…”

Gas Phase Study of Systems for the CVD of Silver

“…[8] However, there have been few investigations into the CVD of silver, and up to now, there is no general agreement on the deposition method (i.e., flash evaporation, aerosol delivery) and precursor choice. Most silver(I) salts, such as silver(I) acetate and silver(I) trifluoroacetylacetonate are involatile or even decompose during sublimation, [8,9] therefore, special evaporation techniques must be used in the deposition of silver films from silver(I) trifluoroacetate, silver(I) iodide, [10] or silver(I) fluoride [11] precursors. Perfluoro-1-methylpropenyl silver has been shown to give good quality silver films at 973 K, [9,10] however, this compound is not easy to handle since it is very reactive with air and moisture.…”

“…Most silver(I) salts, such as silver(I) acetate and silver(I) trifluoroacetylacetonate are involatile or even decompose during sublimation, [8,9] therefore, special evaporation techniques must be used in the deposition of silver films from silver(I) trifluoroacetate, silver(I) iodide, [10] or silver(I) fluoride [11] precursors. Perfluoro-1-methylpropenyl silver has been shown to give good quality silver films at 973 K, [9,10] however, this compound is not easy to handle since it is very reactive with air and moisture. Mixed ligand silver complexes, containing either a fluorinated carboxylate (RCO 2 ) or b-diketonato ligand and a phosphine-or ethylene-based ligand as auxiliary, seem to be promising precursors, combining criteria such as high vapor pressure, thermal stability, and low sensitivity to light and air.…”

Low Temperature MOCVDof Conducting, Micrometer-Thick, Silver Films

“…[28] However, these compounds possess relatively low volatility and/or thermal stability, [29,30] and this hindered further development until more complicated complexes of silver were synthesized and applied to MOCVD. Some of these recent achievements are listed in Table 1.…”