1992
DOI: 10.1007/bf01151815
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Deposition processes and metal cutting applications of TiN coatings

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Cited by 45 publications
(17 citation statements)
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“…Titanium nitride is known as a material of choice for the coating of cutting and grinding tools as protection against wear, erosion and chemical attack [14][15][16][17]. It is also widely used in microelectronic instrumentation as diffusion barrier and adhesion promoter between metallic layers such as Al, Si, Cu, Ag or Pt [18][19][20][21].…”
Section: Introductionmentioning
confidence: 99%
“…Titanium nitride is known as a material of choice for the coating of cutting and grinding tools as protection against wear, erosion and chemical attack [14][15][16][17]. It is also widely used in microelectronic instrumentation as diffusion barrier and adhesion promoter between metallic layers such as Al, Si, Cu, Ag or Pt [18][19][20][21].…”
Section: Introductionmentioning
confidence: 99%
“…This problem can be tackled by applying a protective coating, for instance by nitriding the surface which results in a hard ceramic surface layer and as a consequence enhances both wear and friction properties. Nitriding with techniques like chemical vapour deposition (CVD) and physical vapour deposition (PVD) produces a limited surface layer of a few micrometres [1]. In contrast, laser nitriding may result in a modified layer of several hundreds of micrometres [2][3][4][5][6][7][8].…”
Section: Introductionmentioning
confidence: 99%
“…Pulsed dc reactive magnetron sputtering techniques have been used recently to deposit more ionized and adhesive coatings. 24,25 In addition, the pulsed magnetron sputtering enhances the grade of ionization and the ion to neutral ratio during deposition in order to improve the final quality of the coatings. 26 Although there have been many papers in the literature studying the physical, mechanical, structural and corrosion properties of NbN coatings, no study has been performed, to my knowledge, where the adhesion properties are evaluated using both PLST and MPST.…”
Section: Introductionmentioning
confidence: 99%