Design and analysis of a z-axis tuning fork gyroscope with guided-mechanical coupling

Trinh, Thong Quang; Nguyen, Long; Dao, Dzung Viet; Chu, Hoang Manh; Vu, Hung V.

doi:10.1007/s00542-013-1947-0

Cited by 8 publications

(14 citation statements)

References 22 publications

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“…The natural frequencies of the first and second mode are 25.4 kHz and 44.1 kHz, respectively. The natural frequency discrepancy between the first and second mode is 73.6%, which satisfies the requirement of the low mode cross-talk (Trinh et al, 2013). The stiffness of the spring k z calculated by Eq.…”

Section: Resultssupporting

confidence: 56%

“…The errors between the calculated and simulated results for f x , f y , and f z are 2.9%, 7.2% and 2.3%, respectively. To independently drive the micro-actuator along the x, y and z axes, the mode split has to be large enough to suppress the mode coupling (Trinh et al, 2013;Weinberg and Kourepenis, 2006;Fang et al, 2018, Acar andShkel, 2009). The mode split between the first and second modes is 88.23%, while these two modes are completely splitted with the third mode (0.85 kHz and 1.6 kHz compared to 27.9 kHz).…”

Section: Resultsmentioning

confidence: 99%

“…In these actuation mechanisms, electrostatic actuation is preferred for operation with low power consumption due to capacitance-based actuation without current. On the other hand, much effort is made to improve mechanical structures for sensing applications with high precision (Trinh et al, 2013;Weinberg and Kourepenis, 2006;Acar and Shkel, 2009), however, there are no many reports on the xyz micro-actuator that has a mechanically decoupled structure for easy and precise control of the displacements. Moreover, a xyz micro-actuator having the capability of independent control of the displacements and an easy fabrication process is necessary to report for applications in high precise positioning, low-noise sensing, and scanning probe lithography.…”

Section: Introductionmentioning

confidence: 99%

See 2 more Smart Citations

Design and simulation analysis of an integrated <i>xyz</i> micro-actuator for controlling displacement of a scanning probe

Hieu

Hane³

et al. 2020

Journal of Theoretical and Applied Mechanics

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Section: Resultssupporting

confidence: 56%

Section: Resultsmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

See 1 more Smart Citation

Design and simulation analysis of an integrated <i>xyz</i> micro-actuator for controlling displacement of a scanning probe

Hieu

Hane³

et al. 2020

Journal of Theoretical and Applied Mechanics

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“…As a result, the anti-phase mode frequency will also increase with the rising of the in-phase mode frequency. In order to avoid excessive loss of mechanical sensitivity, many researchers have done much work on the coupling mechanisms to achieve modal inversion [1,18,19,20,21]. This paper uses the coupling mechanisms in [18,21] as the drive coupling mechanism and the sense coupling mechanism, respectively.…”

Section: Structure Designmentioning

confidence: 99%

Design and Implementation of a Dual-Mass MEMS Gyroscope with High Shock Resistance

Gao

Huang

Ding

et al. 2018

Sensors

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This paper presents the design and implementation of a dual-mass MEMS gyroscope with high shock resistance by improving the in-phase frequency of the gyroscope and by using a two-stage elastic stopper mechanism and proposes a Simulink shock model of the gyroscope equipped with the two-stage stopper mechanism, which is a very efficient method to evaluate the shock resistance of the gyroscope. The structural design takes into account both the mechanical sensitivity and the shock resistance. The design of the primary structure and the analysis of the stopper mechanism are first introduced. Based on the expression of the restoring force of the stopper beam, the analytical shock response model of the gyroscope is obtained. By this model, the shock response of the gyroscope is theoretically analyzed, and the appropriate structural parameters are obtained. Then, the correctness of the model is verified by finite element (FE) analysis, where the contact collision analysis is introduced in detail. The simulation results show that the application of the two-stage elastic stopper mechanism can effectively improve the shock resistance by more than 1900 g and 1500 g in the x- and y-directions, respectively. Finally, experimental verifications are carried out by using a machete hammer on the micro-gyroscope prototype fabricated by the deep dry silicon on glass (DDSOG) technology. The results show that the shock resistance of the prototype along the x-, y- and z-axes all exceed 10,000 g. Moreover, the output of the gyroscope can return to normal in about 2 s.

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“…A new micromachined tuning fork gyroscope with an anchored diamond coupling mechanism was proposed in their recent paper, which increased the in-phase mode frequency to be 108.3% higher than the anti-phase one [ 22 ]. A self-rotation ring structure for connecting two sensing proof masses was designed and simulated in [ 23 ], and the in-phase sensing mode was suppressed by using it.…”

Section: Introductionmentioning

confidence: 99%

A Lever Coupling Mechanism in Dual-Mass Micro-Gyroscopes for Improving the Shock Resistance along the Driving Direction

Gao

Huang

et al. 2017

Sensors

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This paper presents the design and application of a lever coupling mechanism to improve the shock resistance of a dual-mass silicon micro-gyroscope with drive mode coupled along the driving direction without sacrificing the mechanical sensitivity. Firstly, the mechanical sensitivity and the shock response of the micro-gyroscope are theoretically analyzed. In the mechanical design, a novel lever coupling mechanism is proposed to change the modal order and to improve the frequency separation. The micro-gyroscope with the lever coupling mechanism optimizes the drive mode order, increasing the in-phase mode frequency to be much larger than the anti-phase one. Shock analysis results show that the micro-gyroscope structure with the designed lever coupling mechanism can notably reduce the magnitudes of the shock response and cut down the stress produced in the shock process compared with the traditional elastic coupled one. Simulations reveal that the shock resistance along the drive direction is greatly increased. Consequently, the lever coupling mechanism can change the gyroscope’s modal order and improve the frequency separation by structurally offering a higher stiffness difference ratio. The shock resistance along the driving direction is tremendously enhanced without loss of the mechanical sensitivity.

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Design and analysis of a z-axis tuning fork gyroscope with guided-mechanical coupling

Cited by 8 publications

References 22 publications

Design and simulation analysis of an integrated <i>xyz</i> micro-actuator for controlling displacement of a scanning probe

Design and simulation analysis of an integrated <i>xyz</i> micro-actuator for controlling displacement of a scanning probe

Design and Implementation of a Dual-Mass MEMS Gyroscope with High Shock Resistance

A Lever Coupling Mechanism in Dual-Mass Micro-Gyroscopes for Improving the Shock Resistance along the Driving Direction

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