Design and Application of Quadrature Compensation Patterns in Bulk Silicon Micro-Gyroscopes

Ni, Yunfang; Li, Hongsheng; Huang, Libin

doi:10.3390/s141120419

Cited by 17 publications

(8 citation statements)

References 6 publications

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“…According to Equations (5) and (8), the quadrature error in the yaw and pitch/roll modes can be corrected by applying appropriate DC voltages on the quadrature electrodes. To simplify the analysis, the measured quadrature error signal can be treated as an input angular rate [ 25 ]. Based on the parameters listed in Table 2 , the simulation result of the quadrature error correction effect can be depicted in Figure 11 a.…”

Section: Simulation Resultsmentioning

confidence: 99%

Design and Analysis of a Novel Fully Decoupled Tri-axis Linear Vibratory Gyroscope with Matched Modes

Xia

Kong

Gao

2015

Sensors

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We present in this paper a novel fully decoupled silicon micromachined tri-axis linear vibratory gyroscope. The proposed gyroscope structure is highly symmetrical and can be limited to an area of about 8.5 mm × 8.5 mm. It can differentially detect three axes’ angular velocities at the same time. By elaborately arranging different beams, anchors and sensing frames, the drive and sense modes are fully decoupled from each other. Moreover, the quadrature error correction and frequency tuning functions are taken into consideration in the structure design for all the sense modes. Since there exists an unwanted in-plane rotational mode, theoretical analysis is implemented to eliminate it. To accelerate the mode matching process, the particle swam optimization (PSO) algorithm is adopted and a frequency split of 149 Hz is first achieved by this method. Then, after two steps of manual adjustment of the springs’ dimensions, the frequency gap is further decreased to 3 Hz. With the help of the finite element method (FEM) software ANSYS, the natural frequencies of drive, yaw, and pitch/roll modes are found to be 14,017 Hz, 14,018 Hz and 14,020 Hz, respectively. The cross-axis effect and scale factor of each mode are also simulated. All the simulation results are in good accordance with the theoretical analysis, which means the design is effective and worthy of further investigation on the integration of tri-axis accelerometers on the same single chip to form an inertial measurement unit.

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Section: Simulation Resultsmentioning

confidence: 99%

Design and Analysis of a Novel Fully Decoupled Tri-axis Linear Vibratory Gyroscope with Matched Modes

Xia

Kong

Gao

2015

Sensors

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“…A quadrature error correction closed loop is proposed in the work, and utilizing the coupling stiffness correction method, the masses are corrected separately. The stiffness correction combs utilize unequal gap method with dc voltages [15]. The bias stability improves from 2.06 to 0.64 /h with Allan Deviation analysis method, and the noise characteristic is also optimized [11].…”

Section: Development Of Dual-mass Mems Gyroscope Structure Quadraturementioning

confidence: 99%

Dual-Mass MEMS Gyroscope Structure, Design, and Electrostatic Compensation

Cao¹,

Li²

2018

MEMS Sensors - Design and Application

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Dual-mass MEMS gyroscope is one of the most popular inertial sensors. In this chapter, the structure design and electrostatic compensation technology for dual-mass MEMS gyroscope is introduced. Firstly, a classical dual-mass MEMS gyroscope structure is proposed, how it works as a tuning fork (drive anti-phase mode), and the structure dynamical model together with the monitoring system are presented. Secondly, the imperfect elements during the structure manufacture process are analyzed, and the quadrature error coupling stiffness model for dual-mass structure is proposed. After that, the quadrature error correction system based on coupling stiffness electrostatic compensation method is designed and evaluated. Thirdly, the dual-mass structure sensing mode modal is proposed, and the force rebalancing combs stimulation method is utilized to achieve sensing mode transform function precisely. The bandwidth of sensing open loop is calculated and experimentally proved as 0.54 times with the resonant frequency difference between sensing and drive modes. Then, proportional-integral-phase-leading controller is presented in sensing close loop to expand the bandwidth, and the experiment shows that the bandwidth is improved from 13 to 104 Hz. Finally, the results are concluded and summarized.

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“…Thus, the quadrature coupling should be compensated to decrease the output error when this frequency tuning loop is used. The quadrature compensation is discussed in [25,26], and in the following simulation the quadrature coupling is assumed to be 0.…”

Section: Frequency Response the Simulation Model Inmentioning

confidence: 99%

Frequency Tuning of Work Modes inZ-Axis Dual-Mass Silicon Microgyroscope

et al. 2014

Journal of Sensors

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Frequency tuning of work modes in the silicon vibratory gyroscope is studied by the theoretical, numerical, and experimental methods in this paper. First, the schematic structure and simplified kinematics model of the gyroscope were presented for deducing the natural frequencies. Then, the width and length of support beams were optimized to tune work frequencies at their designed value. Besides, the frequency difference was experimentally tested and manually tuned by varying the voltage applied on the tuning capacitors. The test on a prototype showed that the difference could be localized between −55.8 Hz and 160.2 Hz when the tuning voltage limit is 20 V. Finally, a frequency control loop was developed to automatically tune the sense frequency toward the drive frequency. Both the theoretical analysis and numeric simulation show that the difference is stabilized at 0.8 Hz when no Coriolis force or quadrature coupling force is applied. It is proved that the frequency difference is successfully tuned by modifying the size of support beams before fabrication as well as the voltage applied on the tuning capacitors after fabrication. The automatic tuning loop, used to match the work modes, is beneficial to enhance the performance of the gyroscope as well as its resistance to environment disturbances.

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Design and Application of Quadrature Compensation Patterns in Bulk Silicon Micro-Gyroscopes

Cited by 17 publications

References 6 publications

Design and Analysis of a Novel Fully Decoupled Tri-axis Linear Vibratory Gyroscope with Matched Modes

Design and Analysis of a Novel Fully Decoupled Tri-axis Linear Vibratory Gyroscope with Matched Modes

Dual-Mass MEMS Gyroscope Structure, Design, and Electrostatic Compensation

Frequency Tuning of Work Modes inZ-Axis Dual-Mass Silicon Microgyroscope

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