Design and construction of the motion mechanism of an XY micro-stage for precision positioning

Measurement technologies for precision positioning

“…Since the thickness of the film is approximately 0.3 mm, it does not influence the characteristics of the leaf spring. The compactness of the Cr-N thin film strain gauge is especially effective for precision positioning of microstages [198]. Recently, eddy current sensors with nanometric resolution are also available in the market [139].…”

A Compact 2-DOF Piezoelectric-Driven Platform Based on “Z-Shaped” Flexure Hinges

“…In the stacked form platforms, one layer only achieves one degree of freedom. Several 2 of 14 motion principles have been applied to obtain this only one motion degree of freedom, for instance stick-slip principle [11][12][13], inchworm principle [14][15][16][17] and ultrasonic principle [18][19][20]. Afterwards, several layers should be stacked together to obtain the multi-DOF motion, which causes the challenge of reliability because of abrasion and complicated structures.…”

Design and Development of Stepper Motor Based XY Scanning Stage

“…The XY stage, which is composed of a motion mechanism driven by actuators for moving an object in the XY plane, is a fundamental component of a positioning system used in industries such as micromachining and scanning probe microscopy [1]. Many of the state-of-the-art ultra-precision XY stages have a stage motion mechanism composed of air-bearing or roller-bearing supported linear slides, which are driven by linear motors.…”

“…Yuki Shimizu et al have designed XY micro-stage which consists of two PZTs and a friction component made by permanent magnet is mounted on the centre of the stage base for driving the stage moving plate made by steel in the X-and Y-directions based on a friction drive. Leaf springs are employed to guide the X-and Y-directional motions of the moving plate over a range of ±1 mm in both directions [1]. Chien-Hung Liu et al have presented a Dual-Axis Long-Travelling Nano-Positioning Stage (DALTNPS).…”