Design and electrochemical preparation of inductive copper coils for magnetic particles detection

Cortés, M.; Martı́nez, S.; Serre, C.; Gómez, Elvira; Pérez-Rodrı́guez, A.; Vallés, E.

doi:10.1016/j.snb.2012.07.096

Cited by 5 publications

(2 citation statements)

References 15 publications

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“…For application in Micro-Electromechanical Systems (MEMS) technologies, thin films and coatings must have good adhesion to the substrate, good corrosion resistance and good wear resistance, while maintaining satisfactory mechanical properties [3][4][5][6][7]. In MEMS technologies, the processes of the formation of uniform and compact Cu films and coatings are applied in the production of inductive copper micro-coils for magnetic particles detection [8], in combination with micro-machining techniques to obtain micro-gear [9], for wiring on printed circuit boards (PCBs) and bottom-up filling or superfilling techniques for fabrication of Through Silicon Via (TSV) structures [10]. In addition, copper coatings are used as sacrificial layers for the production of different laminar composite structures [11].…”

Section: Introductionmentioning

confidence: 99%

Morphology, Structure and Mechanical Properties of Copper Coatings Electrodeposited by Pulsating Current (PC) Regime on Si(111)

Mladenović

Lamovec

Radović

et al. 2020

Metals

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Copper electrodeposition on (111)-oriented Si substrate was performed by the pulsating current (PC) regime at various average current densities in the range of 15-70 mA·cm −2 , obtained by varying either the frequency (30, 50, 80 and 100 Hz for the current density amplitude of 100 mA·cm −2 ) or the current density amplitude (120 and 140 mA·cm −2 at 100 Hz). The produced Cu coatings were examined by SEM, AFM and XRD techniques. The morphology of the coatings changed from those with large grains to fine-grained and globular, while the crystal structure changed from the strong (220) to the strong (111) preferred orientation by increasing the average current density. The mechanical characteristics of coatings were examined using Vickers micro-indentation tests, applying the Chicot-Lesage (C-L) composite hardness model for the analysis of microhardness. The maximum microhardness was obtained for the Cu coating produced at an average current density of 50 mA·cm −2 , with a current density amplitude of 100 mA·cm −2 and a frequency of 100 Hz. This copper coating was fine-grained and showed the smallest roughness in relation to the other coatings, and it was obtained in the mixed activation-diffusion control between the end of the effect of the activation control and the beginning of the dominant effect of diffusion control.

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Section: Introductionmentioning

confidence: 99%

Morphology, Structure and Mechanical Properties of Copper Coatings Electrodeposited by Pulsating Current (PC) Regime on Si(111)

Mladenović

Lamovec

Radović

et al. 2020

Metals

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“…Various processes of copper electrodeposition on different bulk materials were devel-oped for micro electro mechanical systems devices (MEMS), through-hole plating for printed circuit boards (PCBs), as well as for all other conventional functional plating processes on silicon, brass, steel, copper, etc. [3][4][5]. Copper coatings are the most commonly used material for interconnections within microelectronics.…”

Section: Introductionmentioning

confidence: 99%

Structural, Mechanical and Electrical Characteristics of Copper Coatings Obtained by Various Electrodeposition Processes

et al. 2022

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Mechanical (hardness and adhesion) and electrical (sheet resistance) characteristics of electrolytically produced copper coatings have been investigated. Morphologies of Cu coatings produced galvanostatically at two current densities from the basic sulfate electrolyte and from an electrolyte containing levelling/brightening additives without and with application of ultrasound for the electrolyte stirring were characterized by SEM and AFM techniques. Mechanical characteristics were examined by Vickers microindentation using the Chen–Gao (C–G) composite hardness model, while electrical characteristics were examined by the four-point probe method. Application of ultrasound achieved benefits on both hardness and adhesion of the Cu coatings, thereby the use of both the larger current density and additive-free electrolyte improved these mechanical characteristics. The hardness of Cu coatings calculated according to the C–G model was in the 1.1844–1.2303 GPa range for fine-grained Cu coatings obtained from the sulfate electrolyte and in the 0.8572–1.1507 GPa range for smooth Cu coatings obtained from the electrolyte with additives. Analysis of the electrical characteristics of Cu coatings after an aging period of 4 years showed differences in the sheet resistance between the top and the bottom sides of the coating, which is attributed to the formation of a thin oxide layer on the coating surface area.

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Sensing and simulation of self-inductance of a flat, circular coil in the presence of four water-based nanofluids

Rapp

Hussam

2023

Journal of Applied Physics

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Inductive sensors (ISs) are extremely sensitive sensing platforms that offer high resolution and currently serve as a relatively popular sensing platform for the detection of metals, nonmetals, and semiconductors. However, in spite of wonderful usability, there is a startling lack of IS implementation as a chemical sensor. Similarly, nanofluids (NFs) have gained more traction in the past decade since the physical properties of base fluids become heightened with the addition of nanoparticles (NPs). Regardless of these advantages, both areas lack studies regarding the behavior of NFs under a magnetic field (B-field). We show how a novel technique using a high-resolution, non-invasive inductance-to-digital converter (LDC) sensor is used to detect different NFs of varying physical properties. The LDC proves highly capable of not only serving as an extremely accurate and precise chemical sensor but also allowing us to determine how exposing several NFs to an inductor's B-field affects particle behavior in solution with extremely low signal and concentration detection limits. The four NF systems contain diamond, rutile, magnetite, and gold NPs where the sensor demonstrated superior sensitivity to gold-enhanced NFs. This exciting finding followed expected theoretical trends based on Faraday's laws of magnetism, and the experimental results were validated with finite element simulations within less than 1.0% error.

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Design and electrochemical preparation of inductive copper coils for magnetic particles detection

Cited by 5 publications

References 15 publications

Morphology, Structure and Mechanical Properties of Copper Coatings Electrodeposited by Pulsating Current (PC) Regime on Si(111)

Morphology, Structure and Mechanical Properties of Copper Coatings Electrodeposited by Pulsating Current (PC) Regime on Si(111)

Structural, Mechanical and Electrical Characteristics of Copper Coatings Obtained by Various Electrodeposition Processes

Sensing and simulation of self-inductance of a flat, circular coil in the presence of four water-based nanofluids

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