Design and fabrication development of a micro flow heated channel with measurements of the inside micro-scale flow and heat transfer process

Improved Design of Microchannel Plate Geometry for Uniform Flow Distribution

“…The effect of using different number of ports has been studied and the difference in that a signifi cant increase in heat transfer can be obtained just by decreasing the heat exchanger dimensions by one order of magnitude. In addition, Liu et al (2004) designed and fabricated a micro fl ow heated channel with perfect insulation on the wall. The main aim of this work is to acquire a uniform heat fl ux boundary condition on the channel wall.…”

Micropressure sensor fabrication without problem of stiction for a wider range of measurement

“…In the current process, one would like to select the concentration of boron such that the resistivity variation with the temperature in the polysilicon layer can be minimized. From the experimental data plotted in [16,17], for boron concentration greater than 10 20 atm/cm 3 the resistivity variation with temperature can be negligible small. Therefore, this concentration of boron is adopted in the implantation process for the polysilicon layer.…”

Study of the temperature field in microchannels of a PDMS chip with embedded local heater using temperature-dependent fluorescent dye

“…Generally, electric resistance microheaters are patterned onto a glass or silicon wafer surface using microfabrication technology [15][16][17], and a glass or silicon chip with a microchannel is bonded onto the surface, so that the microheaters can heat the fluid in the microchannel. The microchannel is either molded into a polymer [6,18], etched into glass [11], or fabricated from photoresist [19]. Joule heating, which results from current passing through a solution via electrodes, has been investigated as a means of heating [20].…”