Design and Fabrication of Capacitive Silicon Nanomechanical Resonators with Selective Vibration of a High-Order Mode

Abstract

This paper reports the design and fabrication of capacitive silicon nanomechanical resonators with the selective vibration of a high-order mode. Fixed-fixed beam capacitive silicon resonators have been successfully produced by the use of electron beam lithography, photolithography, deep reactive ion etching, and anodic bonding methods. All resonators with different vibration modes are designed to have the same resonant frequency for performance comparison. Measurement results show that higher-order mode capacitive silicon resonators can achieve lower insertion loss compared to that of lower-order mode capacitive silicon resonators. The motional resistance of the fourth mode vibration resonator is improved by 83%, 90%, and 93% over the third, second, and first mode vibration resonators, respectively.

Aluminum doped zinc oxide deposited by atomic layer deposition and its applications to micro/nano devices

“…Nanomechanical resonators keep an important role in a variety of applications such as high-sensitive sensors 5 , timing and frequency reference 67 , molecular mass detection 68 , and quantum information processing 69 owing to their advantages including the small size, high-frequency range, and low power consumption. Herein, the fabrication and evaluation of different nanomechanical resonators from a simple structure (a bridged nanobeam structure) to a complex structure (a vertical nanomechanical capacitive resonator) are investigated and demonstrated.…”

Electrostatically Driven Nanoelectromechanical Logical Gates Utilising Selective Tungsten Chemical Vapor Deposition

“…The device layer is etched until reaching the oxide layer by controlling etching time of deep RIE process, as shown in Figure (f). Smooth and vertical etched shapes are achieved, as demonstrated in our recent works . Next, the 1 µm‐thick oxide layer of the SOI wafer was etched by BHF (buffered hydrofluoric acid) etching, and the structures are released.…”

Monostable Dynamic Analysis of Microbeam-Based Resonators via an Improved One Degree of Freedom Model

“…Microbeam-based structures are widely applied in MEMS, such as microactuator/sensor [ 1 , 2 , 3 ], energy harvester [ 4 ], microresonator [ 5 , 6 , 7 ], gyroscope [ 8 ], microgripper [ 9 , 10 ] and so on. Their light weight, small size, low-energy consumption and durability make them even more attractive.…”