Design and fabrication of scanning mirror for laser display

Free-Space Optical MEMS

“…Figure 7.11 shows a large-area (1.5 × 1.2 mm 2 ) scanning mirror with a movable comb directly integrated underneath the mirror. [39] The scanners were fabricated with DRIE, and fixed and moving combs were fabricated in two separate SCS layers that were bonded together with a gold-tin layer using a flip-chip aligner. The bottom silicon layer was anodically bonded to glass before the fixed combs were etched.…”

A Novel High-Speed Electromagnetic Oscillatory Actuator With a Dual Mover for Optical Scanner Applications

“…Applications such as laser television and laser printing require scanning frequencies of more than a few thousand to several tens of thousand Hz [1]- [3]. Typical high-speed optical actuators realize sweeping performance using polygon motors.…”

A Characteristic Study of Micromirror with Sidewall Electrodes

“…Traditionally, a biaxial micromirror is actuated by either four separate bottom electrodes (Toshiyoshi et al 2001) and two outer bottom electrodes on the outer attraction plates of the micromirror (Yeow et al 2005). In addition, some micromirror designs adopted comb-drive actuators (Hah et al 2004a;Hah et al 2004b;Kwon et al 2004;Lee et al 2002;Xie et al 2003); however, comb-drive actuator is complex in fabrication and processing. They often increase the required area to accommodate the actuators and thereby increase the overall device size.…”

“…For the parallel-plate actuators, the electrode configuration has a significant effect on the drive voltage threshold. Two typical electrode configurations have already been demonstrated: 1) planar electrode configuration (Hah et al 2004a;Hah et al 2004b;Kwon et al 2004;Lee et al 2002;Xie et al 2003;Yeow et al 2005) and 2) inclined electrode configuration (Camon and Larnaudie 2000;Cichalewski et al 2003). The first configuration is very popular, and the second one is used by a handful of designers.…”