Design and fabrication of thin-film aluminum microheater and nickel temperature sensor

Phatthanakun, Rungrueang; Deekla, P.; Pummara, W.; Sriphung, C.; Pantong, C.; Chomnawang, Nimit

doi:10.1109/nems.2012.6196735

Cited by 20 publications

(8 citation statements)

References 5 publications

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“…For example, to achieve the best performance, accuracy, widespread temperature scope and stability, platinum and gold will be the best decisions for the microheater [89]. However, they are costly [90]. Utilizing microheaters in MEMS sensors need a built-in temperature sensor to convert the produced heat to useful output.…”

Section: Moving Directionmentioning

confidence: 99%

“…Utilizing microheaters in MEMS sensors need a built-in temperature sensor to convert the produced heat to useful output. For temperature sensors, platinum is available in the − 200 ºC to 800 ºC temperature range and nickel is available in the − 100 to 260 ºC [90]. According to reports, aluminium is also a good material for temperature sensing [91].…”

Section: Moving Directionmentioning

confidence: 99%

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A Review of Actuation and Sensing Mechanisms in MEMS-Based Sensor Devices

et al. 2021

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Over the last couple of decades, the advancement in Microelectromechanical System (MEMS) devices is highly demanded for integrating the economically miniaturized sensors with fabricating technology. A sensor is a system that detects and responds to multiple physical inputs and converting them into analogue or digital forms. The sensor transforms these variations into a form which can be utilized as a marker to monitor the device variable. MEMS exhibits excellent feasibility in miniaturization sensors due to its small dimension, low power consumption, superior performance, and, batch-fabrication. This article presents the recent developments in standard actuation and sensing mechanisms that can serve MEMS-based devices, which is expected to revolutionize almost many product categories in the current era. The featured principles of actuating, sensing mechanisms and real-life applications have also been discussed. Proper understanding of the actuating and sensing mechanisms for the MEMS-based devices can play a vital role in effective selection for novel and complex application design.

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Section: Moving Directionmentioning

confidence: 99%

Section: Moving Directionmentioning

confidence: 99%

A Review of Actuation and Sensing Mechanisms in MEMS-Based Sensor Devices

et al. 2021

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“…The current supplied is in few hundred microns (0.07A). The electrical current converted into heat flows through resistor 8,9 . The work presents the corresponding electrical potential of four temperature sensors.…”

Section: Design Of Temperature Sensors Using Comsolmentioning

confidence: 99%

Design and Fabrication of Temperature Sensor for Weather Monitoring System using MEMS Technology

Veeramani

Juliet

et al. 2018

Orient. J. Chem

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In this paper, Micro Electro Mechanical System (MEMS) based temperature sensor is designed and fabricated for weather monitoring system at troposphere level. In this design we have used meander shape, because it is easy to vary the length. We have optimized the length in this design. Due to certain advantages like low cost, easily available, high melting and boiling point, molybdenum material is used for fabrication of this design. The four meander type temperature sensors are designed with various dimensions of sizes in 6.7mm×4mm, 9.5mm×4mm, 5.2mm×4mm, 6.5mm×4mm. The Temperature Coefficient of Resistance (TCR) values for four various sensors mentioned above are 3.4 ×10-4 C-1, 3.7×10-4 C-1, 7.0×10-4 C-1, 7.5×10-4 C-1. For radiosonde applications the sensor must have high sensitivity, high degree of accuracy, good linearity and with better TCR values. The experimental results are better for dimension 6.7mm ×4mm for all characteristics mentioned above. The practical results are compared with the theoretical values.

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“…The diagram in Figure 1 represents the fabrication process sequence of Al microheater and Ni temperature sensor on a glass substrate [23]. Firstly, the fabrication of microheater based on the glass slide by deposition of Al layer using thermal evaporation is shown in Figure 1 Table 2 and Figure 2 which shows schematic diagram of microheater-sensor set consisting of an Al microheater surrounding a Ni RTD sensor.…”

Section: Design and Fabricationmentioning

confidence: 99%

Al Microheater and Ni Temperature Sensor Set based-on Photolithography with Closed-Loop Control

Deekla

Phatthanakun

Sujitjorn

et al. 2015

IJECE

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This article proposes the development of a new low-cost microheater and temperature sensor set. It was developed based on Micro-Electro-Mechanical Systems (MEMS) which based on photolithography technique and lift-off technique. Thin film of aluminum was utilized as microheater and encompassed nickel temperature sensor inside in order to decrease response time of the desired temperature. To control the various temperatures correctly, closed-loop feedback control based on PI-controller was adapted into control circuit system. Microcontroller was implemented to control and observe the responses of temperature between 40°C and 120°C. Simulation and experimental results are also presented.

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Design and fabrication of thin-film aluminum microheater and nickel temperature sensor

Cited by 20 publications

References 5 publications

A Review of Actuation and Sensing Mechanisms in MEMS-Based Sensor Devices

A Review of Actuation and Sensing Mechanisms in MEMS-Based Sensor Devices

Design and Fabrication of Temperature Sensor for Weather Monitoring System using MEMS Technology

Al Microheater and Ni Temperature Sensor Set based-on Photolithography with Closed-Loop Control

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