2018
DOI: 10.1088/2040-8986/aab6e5
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Design and fabrication of three-dimensional polymer mode multiplexer based on asymmetric waveguide couplers

Abstract: A polymer mode multiplexer based on asymmetric couplers is theoretically designed and experimentally demonstrated. The proposed X-junction coupler is formed by waveguides overlapped with different crossing angles in the vertical direction. A beam propagation method is adopted to optimize the dimensional parameters of the mode multiplexer to convert LP01 mode of two lower waveguides to LP11a and LP21a mode of the upper waveguide. The ultraviolet lithography and wet chemical etching are used in the fabrication p… Show more

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Cited by 12 publications
(4 citation statements)
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“…Therefore, the width of the waveguide was 1.5 µm and the thickness was 3 µm. Most mode converters use long-period waveguide gratings or vertical directional coupling structures [24,25]. In this paper, a vertical asymmetric MZI structure was designed to be compatible with the switch fabrication process [22].…”
Section: Mode Convertermentioning
confidence: 99%
“…Therefore, the width of the waveguide was 1.5 µm and the thickness was 3 µm. Most mode converters use long-period waveguide gratings or vertical directional coupling structures [24,25]. In this paper, a vertical asymmetric MZI structure was designed to be compatible with the switch fabrication process [22].…”
Section: Mode Convertermentioning
confidence: 99%
“…On the other hand, the MDM technologies have also been demonstrated in integrated silicon photonics, where the selective mode couplings are realized relied on the phase matching condition [50]. These on-chip mode (de)multiplexers typically have large footprints, for instance, the directional couplers based on the polymer waveguides have the coupling length of several millimeters [51,52]. Therefore, a highly compact mode (de)multiplexer specifically designed for 3D PICs is highly desired.…”
Section: Vertical Mode (De)multiplexermentioning
confidence: 99%
“…Epoxy (EPO) polymer is a commonly used permanent epoxy negative photoresist. After ultraviolet (UV) exposure, its chemical stability and corrosion resistance are greatly improved due to the cross-linking solidification reaction [36]. The EPO clad and EPO core are used as the cladding layer and the waveguide core, respectively.…”
Section: Structure and Principlementioning
confidence: 99%
“…Because SPP waves are transverse magnetic (TM) polarized, only TM modes are considered in the following calculations. The RIs of the EPO clad, EPO core, PMMA are assumed to be n c = 1.568, n o = 1.575, and n b = 1.495, respectively [36].…”
Section: Simulationsmentioning
confidence: 99%