A low phase‐noise planar X‐band oscillator using high‐Q substrate integrated waveguide (SIW) bandpass filter within its feedback loop is presented.The SIW filter as a frequency stabilization element is used in planar oscillator, and the phase noise of oscillator is significantly reduced by the group‐delay peaks formed at the passband edges of the high‐Q SIW filter. A 9‐GHz oscillator using the optimized high‐Q SIW filter in the feedback loop is designed and tested. The measured phase noise of planar oscillator is 115.3 dBc/Hz at 100‐KHz offset frequency with 9.97‐dBm as output power. © 2011 Wiley Periodicals, Inc. Microwave Opt Technol Lett, 2011; View this article online at wileyonlinelibrary.com. DOI 10.1002/mop.26047